脉冲直流电化学沉积法沉积一维互联纳米线Co3O4膜的LPG和NH3传感特性

P. Shelke, Y. Khollam, M. Chaskar, K. Mohite
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The (CH3COO)2Co.4H2O (0.5 M) and H3BO3 (0.15 M) were dissolved one by one in 250 ml of double distilled water and then filtered using Whatman 41 filter paper. The cobalt based thin films were deposited on thoroughly cleaned stainless steel (SS) and copper (CU) substrates (each of size: 2 cm × 2 cm & thickness = 0.5 mm) using pulsed DC electrochemical deposition method. The films were deposited by using following parameters: (1) pH of solution ∼ 4.5 (by adding NaOH / HCl in solution), (2) cathode-anode distance ∼ 2.5 cm, (3) pulsed deposition on time = 1.5 minute, (4) pulsed off time = 20 sec, (5) total deposition time = 11 minute and (6) current density ∼ 8 mA/cm2. All as-deposited films were heated at 350 °C for 2 hr. The films prepared on SS and CU substrates were identified as PESA and PEUA respectively. The resultant films were characterized by using X-ray diffraction (XRD), Raman spectroscopy and scanning electron microscopy (SEM). The LPG and NH3 gas sensing properties: sensitivity factor (S.F.), response time, recovery time and repeatability of these films were measured at room temperature (RT) by using home-built static gas sensing system at different concentrations ranging from ∼ 25 to 350 ppm of a given test gas.The XRD and Raman spectroscopy studies clearly indicated the formation of pure Co3O4 phase in these films. The values of lattice parameter (ao) calculated for PESA and PEUA films are found to be 8.063 Å and 8.062 Å respectively, which are found to be matching with reported value = 8.084 Å for cubic spinel Co3O4. The morphological studies of films by SEM showed some interesting observations. The surface of each film is found to be covered with the mesh of interlinked wires with more or less flat base. The interlinked wired mesh is noted to be attached firmly to base at different points with the insertion of ends of wires into the surface at those points. The diameters and lengths of 1-D interlinked wires are found to be between 250 – 350 nm and 2 – 10 µm respectively. The densification at the surface of each film is seen to be moderate, however, qualitatively the densification below the interlinked wired mesh structure is found to be good. The LPG and NH3 gas sensing properties of PESA and PEUA films showed the increase in S.F. with increasing the gas concentration. Both the films are found to be more sensible to LPG gas as compared to the NH3 gas. In case of NH3 gas sensing, the maximum values of S.F. are found to be 264 and 232 for the PESA and PEUA films respectively. Further, in case of LPG gas sensing, the maximum values of S.F. are found to be 248 and 230 for the PESA and PEUA films respectively. Hence, PESA film is observed to be more sensible for LPG and NH3 gases as compared to PEUA film. Further, the measurement of gas sensing properties for number of cycles clearly indicated the repeatability of gas sensing results of these films. For both films, the response time (2 – 3 min.) is found to be much higher than the recovery time (25 – 30 sec). The response time is found to higher for LPG gas as compared to the NH3 gas for both the films. These results undoubtedly proved the efficacy of 1-D interlinked nanowired Co3O4 films sensors prepared in present work. 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引用次数: 0

摘要

目前,我们的环境受到汽车和化学工业排放的大量气体的污染。有害气体的检测正成为社会的需要。传感器在排放控制、环境保护、公共安全和人体健康等领域发挥着重要作用。在过去的几十年里,已经开发了几种气体传感器。Co3O4是一种重要的p型半导体,具有正常尖晶石结构,具有许多商业或潜在的应用。然而,文献研究表明,目前还没有基于Co3O4的薄膜气体传感器的报道。鉴于此,本文研究了采用脉冲直流电化学沉积方法沉积的一维互联纳米线Co3O4薄膜的LPG和NH3传感特性。(CH3COO) 2有限公司4H2O (0.5 M)和H3BO3 (0.15 M)分别溶于250 ml双蒸馏水中,然后用Whatman 41滤纸过滤。采用脉冲直流电化学沉积法将钴基薄膜沉积在彻底清洗过的不锈钢(SS)和铜(CU)衬底上(尺寸分别为2cm × 2cm,厚度= 0.5 mm)。采用以下参数沉积薄膜:(1)溶液pH ~ 4.5(通过在溶液中加入NaOH / HCl),(2)阴极-阳极距离~ 2.5 cm,(3)脉冲沉积时间= 1.5分钟,(4)脉冲沉积时间= 20秒,(5)总沉积时间= 11分钟,(6)电流密度~ 8 mA/cm2。所有沉积膜在350°C下加热2小时。在SS和CU衬底上制备的膜分别被鉴定为PESA和PEUA。利用x射线衍射(XRD)、拉曼光谱(Raman spectroscopy)和扫描电子显微镜(SEM)对合成膜进行了表征。在室温(RT)下,使用自制的静态气敏系统测量了LPG和NH3的气敏性能:灵敏度因子(sf)、响应时间、恢复时间和可重复性,测试气体的浓度从25 ppm到350 ppm不等。XRD和拉曼光谱研究清楚地表明在这些薄膜中形成了纯Co3O4相。PESA和PEUA薄膜的晶格参数ao值分别为8.063 Å和8.062 Å,与报道的立方尖晶石Co3O4的晶格参数ao值= 8.084 Å相吻合。用扫描电镜对薄膜进行了形态学研究,发现了一些有趣的现象。发现每个薄膜的表面都覆盖着或多或少平坦的相互连接的金属丝网。所述互连的有线网被注意到在不同的点上牢固地附着在基座上,并且在那些点上将电线的末端插入表面。一维互连导线的直径和长度分别在250 - 350 nm和2 - 10 μ m之间。每层膜表面的致密化程度适中,但定性地说,互连的有线网状结构下面的致密化是良好的。PESA和PEUA膜的LPG和NH3气敏性能随气体浓度的增加而增加。与NH3气体相比,这两种膜对LPG气体更敏感。在NH3气敏情况下,PESA和PEUA膜的S.F.最大值分别为264和232。此外,在LPG气体传感的情况下,PESA和PEUA薄膜的S.F.最大值分别为248和230。因此,与PEUA膜相比,PESA膜对LPG和NH3气体更敏感。此外,循环次数的气敏性能测量清楚地表明了这些膜的气敏结果的可重复性。对于这两种薄膜,反应时间(2 - 3分钟)被发现远高于恢复时间(25 - 30秒)。在两种薄膜中,LPG气体的响应时间都比NH3气体高。这些结果无疑证明了本工作制备的一维互联纳米线Co3O4薄膜传感器的有效性。观察结果表明,这些一维互连纳米线Co3O4薄膜在不同领域的LPG和NH3气敏应用中具有潜在的用途。
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LPG and NH3 sensing characteristics of 1-D interlinked nanowired Co3O4 films deposited by using pulsed D.C. electrochemical deposition method
Presently, our environment is polluted by number of gases exhausted from auto and chemical industry. The detection of harmful gases is becoming a need of society. Sensors play an important role in the areas of emissions control, environmental protection, public safety and human health. Over the past decades, several kinds of gas sensors have been developed. Co3O4 is an important p-type semiconductor with a normal spinel structure and it has many commercial or potential applications. However, literature research revealed that thin film gas sensors based on Co3O4 are not reported up to now. In view of this, the LPG and NH3 sensing characteristics of 1-D interlinked nanowired Co3O4 films deposited by using pulsed D.C. electrochemical deposition method are presented in this paper. The (CH3COO)2Co.4H2O (0.5 M) and H3BO3 (0.15 M) were dissolved one by one in 250 ml of double distilled water and then filtered using Whatman 41 filter paper. The cobalt based thin films were deposited on thoroughly cleaned stainless steel (SS) and copper (CU) substrates (each of size: 2 cm × 2 cm & thickness = 0.5 mm) using pulsed DC electrochemical deposition method. The films were deposited by using following parameters: (1) pH of solution ∼ 4.5 (by adding NaOH / HCl in solution), (2) cathode-anode distance ∼ 2.5 cm, (3) pulsed deposition on time = 1.5 minute, (4) pulsed off time = 20 sec, (5) total deposition time = 11 minute and (6) current density ∼ 8 mA/cm2. All as-deposited films were heated at 350 °C for 2 hr. The films prepared on SS and CU substrates were identified as PESA and PEUA respectively. The resultant films were characterized by using X-ray diffraction (XRD), Raman spectroscopy and scanning electron microscopy (SEM). The LPG and NH3 gas sensing properties: sensitivity factor (S.F.), response time, recovery time and repeatability of these films were measured at room temperature (RT) by using home-built static gas sensing system at different concentrations ranging from ∼ 25 to 350 ppm of a given test gas.The XRD and Raman spectroscopy studies clearly indicated the formation of pure Co3O4 phase in these films. The values of lattice parameter (ao) calculated for PESA and PEUA films are found to be 8.063 Å and 8.062 Å respectively, which are found to be matching with reported value = 8.084 Å for cubic spinel Co3O4. The morphological studies of films by SEM showed some interesting observations. The surface of each film is found to be covered with the mesh of interlinked wires with more or less flat base. The interlinked wired mesh is noted to be attached firmly to base at different points with the insertion of ends of wires into the surface at those points. The diameters and lengths of 1-D interlinked wires are found to be between 250 – 350 nm and 2 – 10 µm respectively. The densification at the surface of each film is seen to be moderate, however, qualitatively the densification below the interlinked wired mesh structure is found to be good. The LPG and NH3 gas sensing properties of PESA and PEUA films showed the increase in S.F. with increasing the gas concentration. Both the films are found to be more sensible to LPG gas as compared to the NH3 gas. In case of NH3 gas sensing, the maximum values of S.F. are found to be 264 and 232 for the PESA and PEUA films respectively. Further, in case of LPG gas sensing, the maximum values of S.F. are found to be 248 and 230 for the PESA and PEUA films respectively. Hence, PESA film is observed to be more sensible for LPG and NH3 gases as compared to PEUA film. Further, the measurement of gas sensing properties for number of cycles clearly indicated the repeatability of gas sensing results of these films. For both films, the response time (2 – 3 min.) is found to be much higher than the recovery time (25 – 30 sec). The response time is found to higher for LPG gas as compared to the NH3 gas for both the films. These results undoubtedly proved the efficacy of 1-D interlinked nanowired Co3O4 films sensors prepared in present work. The observed results indicated the potential use of these 1-D interlinked nanowired Co3O4 films for LPG and NH3 gas sensing applications in different areas.
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