0.9PMN-0.1PT MIM电容器的制备及其电性能

A. Leuliet, N. Jamond, R. Bisaro, G. Garry, M. Pham-thi, A. Ziaei, L. Michalas, M. Koutsoureli, G. Papaioannou
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引用次数: 0

摘要

本文介绍了0.9PMN-0.1PT铂电极MIM电容器的制备与表征。通过脉冲激光沉积(PLD)将薄膜沉积在缓冲层(SrRuO3)上,该缓冲层已被证明是促进PMN-PT生长所必需的,而不是焦绿盐。电流电压特性的温度分析表明,由于肖特基辐射,直流电导率受界面控制。决定器件电流的其他重要参数是施加偏置的幅度、极性和持续时间。
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Fabrication and electrical properties of 0.9PMN-0.1PT MIM capacitors
This paper describes the fabrication and characterization of 0.9PMN-0.1PT MIM capacitors with platinum electrodes. The films have been deposited by Pulsed Laser Deposition (PLD) on a buffer layer (SrRuO3) which has been demonstrated to be essential to enhance the growth of PMN-PT instead of pyrochlore. The temperature analysis of the current voltage characteristics revealed that the dc conductivity is interface controlled due to Schottky emission. The other important parameters determining the device current are magnitude, polarity and duration of the applied bias.
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