Xianbin He, Liangyu Cui, K. Cai, Yanling Tian, Xianping Liu
{"title":"一种为高速原子力显微镜设计的平行运动扫描仪","authors":"Xianbin He, Liangyu Cui, K. Cai, Yanling Tian, Xianping Liu","doi":"10.1109/3M-NANO.2017.8286288","DOIUrl":null,"url":null,"abstract":"Atomic force microscopy (AFM) is a useful tool in nanoscale measurement. However, conventional AFM suffers from slow scan speed, limiting the use for biological detection or nanofabrication, due to the limited bandwidth of AFM components. In which the resonant frequency of the AFM scanner is usually too low to achieve high-speed scanning. In this paper, a parallel kinematic piezoelectric actuator (PZT) AFM scanner is designed to achieve high-speed atomic force microscopy (HS-AFM) scanning. After that, finite element analysis (FEA) is adopted to characterize the scanner. Finally, images of standard gratings obtained at 25 Hz with our home-made AFM system is presented after calibration and motion coupling compensation.","PeriodicalId":6582,"journal":{"name":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","volume":"282 1","pages":"46-49"},"PeriodicalIF":0.0000,"publicationDate":"2017-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A parallel kinematic scanner designed for high-speed atomic force microscopy\",\"authors\":\"Xianbin He, Liangyu Cui, K. Cai, Yanling Tian, Xianping Liu\",\"doi\":\"10.1109/3M-NANO.2017.8286288\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Atomic force microscopy (AFM) is a useful tool in nanoscale measurement. However, conventional AFM suffers from slow scan speed, limiting the use for biological detection or nanofabrication, due to the limited bandwidth of AFM components. In which the resonant frequency of the AFM scanner is usually too low to achieve high-speed scanning. In this paper, a parallel kinematic piezoelectric actuator (PZT) AFM scanner is designed to achieve high-speed atomic force microscopy (HS-AFM) scanning. After that, finite element analysis (FEA) is adopted to characterize the scanner. Finally, images of standard gratings obtained at 25 Hz with our home-made AFM system is presented after calibration and motion coupling compensation.\",\"PeriodicalId\":6582,\"journal\":{\"name\":\"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"volume\":\"282 1\",\"pages\":\"46-49\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/3M-NANO.2017.8286288\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 IEEE International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/3M-NANO.2017.8286288","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A parallel kinematic scanner designed for high-speed atomic force microscopy
Atomic force microscopy (AFM) is a useful tool in nanoscale measurement. However, conventional AFM suffers from slow scan speed, limiting the use for biological detection or nanofabrication, due to the limited bandwidth of AFM components. In which the resonant frequency of the AFM scanner is usually too low to achieve high-speed scanning. In this paper, a parallel kinematic piezoelectric actuator (PZT) AFM scanner is designed to achieve high-speed atomic force microscopy (HS-AFM) scanning. After that, finite element analysis (FEA) is adopted to characterize the scanner. Finally, images of standard gratings obtained at 25 Hz with our home-made AFM system is presented after calibration and motion coupling compensation.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
