BaTiO3/Ga2O3和In2O3/Ga2O3异质结构带对准的x射线光电子能谱研究

Y. Zhi, Zeng Liu, Xia Wang, Sisi Li, Xiaolong Wang, X. Chu, Peigang Li, D. Guo, Zhenping Wu, W. Tang
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引用次数: 8

摘要

利用x射线光电子能谱(XPS)研究了BaTiO3/Ga2O3和In2O3/Ga2O3异质结构的能带排列。本实验所用样品均采用脉冲激光沉积法沉积。通过紫外-可见吸收光谱测量得到BaTiO3、In2O3和Ga2O3的光学带隙分别为3.59、3.71和4.9 eV。根据kaut方程,利用XPS数据计算出BaTiO3/Ga2O3和In2O3/Ga2O3界面的价带偏移量分别为1.19和1.13 eV,导带偏移量分别为0.11和0.07 eV。BaTiO3/Ga2O3和In2O3/Ga2O3异质结均呈现i型排列。从这两种异质结的应用角度来看,幸运而有趣的是,BaTiO3和In2O3都被证明是将电子注入Ga2O3的优秀材料,对于Ga2O3来说,作为金属和Ga2O3之间的中间层,它们很可能有助于降低接触电阻。总之,本工作对进一步研究相对异质结的器件设计和开发具有指导意义。利用x射线光电子能谱(XPS)研究了BaTiO3/Ga2O3和In2O3/Ga2O3异质结构的能带排列。本实验所用样品均采用脉冲激光沉积法沉积。通过紫外-可见吸收光谱测量得到BaTiO3、In2O3和Ga2O3的光学带隙分别为3.59、3.71和4.9 eV。根据kaut方程,利用XPS数据计算出BaTiO3/Ga2O3和In2O3/Ga2O3界面的价带偏移量分别为1.19和1.13 eV,导带偏移量分别为0.11和0.07 eV。BaTiO3/Ga2O3和In2O3/Ga2O3异质结均呈现i型排列。从这两种异质结的应用来看,幸运和有趣的是,BaTiO3和In2O3都被证明是将电子注入Ga2O3的优秀材料,并且可能有利于降低接触电阻,对于Ga2O3来说,作为金属和金属之间的中间层。
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X-ray photoelectron spectroscopy study for band alignments of BaTiO3/Ga2O3 and In2O3/Ga2O3 heterostructures
The energy-band alignments of BaTiO3/Ga2O3 and In2O3/Ga2O3 heterostructures are investigated by x-ray photoelectron spectroscopy (XPS). All of the samples used in this experiment are deposited by pulsed laser deposition method. The optical bandgaps of BaTiO3, In2O3, and Ga2O3 are derived to be 3.59, 3.71, and 4.9 eV, respectively, by ultraviolet-visible absorption spectrum measurement. In detail, the valence band offsets at BaTiO3/Ga2O3 and In2O3/Ga2O3 interfaces are calculated to be 1.19 and 1.13 eV by using the XPS data based on Kraut’s equation, while, correspondingly, the conduction band offsets are 0.11 and 0.07 eV, respectively. Both BaTiO3/Ga2O3 and In2O3/Ga2O3 heterojunctions exhibit type-I alignments. From the view of applications of these two fabricated heterojunctions, fortunately and interestingly, both BaTiO3 and In2O3 are certified as excellent materials to inject electrons into Ga2O3 and may well be beneficial to the contact resistance reduction, for Ga2O3, as interlayers between metals and Ga2O3. Overall, this work is valuable and instructional for device designing and development by right of the relative heterojunctions in further investigations.The energy-band alignments of BaTiO3/Ga2O3 and In2O3/Ga2O3 heterostructures are investigated by x-ray photoelectron spectroscopy (XPS). All of the samples used in this experiment are deposited by pulsed laser deposition method. The optical bandgaps of BaTiO3, In2O3, and Ga2O3 are derived to be 3.59, 3.71, and 4.9 eV, respectively, by ultraviolet-visible absorption spectrum measurement. In detail, the valence band offsets at BaTiO3/Ga2O3 and In2O3/Ga2O3 interfaces are calculated to be 1.19 and 1.13 eV by using the XPS data based on Kraut’s equation, while, correspondingly, the conduction band offsets are 0.11 and 0.07 eV, respectively. Both BaTiO3/Ga2O3 and In2O3/Ga2O3 heterojunctions exhibit type-I alignments. From the view of applications of these two fabricated heterojunctions, fortunately and interestingly, both BaTiO3 and In2O3 are certified as excellent materials to inject electrons into Ga2O3 and may well be beneficial to the contact resistance reduction, for Ga2O3, as interlayers between metals and...
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