{"title":"用投影离子束光学系统制备矩形氧离子束减薄法制备无砷污染扫描透射电镜样品","authors":"H. Shichi, S. Tomimatsu","doi":"10.1116/6.0000297","DOIUrl":null,"url":null,"abstract":"Rectangular-shaped oxygen O2+ ion beam thinning for scanning transmission electron microscope (STEM) sample preparation was investigated using a projection ion beam optical system equipped with a duoplasmatron gas ion source. The ion current can be increased by increasing the area of the rectangular-shaped oxygen ion beam and thereby overcome the low brightness of the ion source. Rectangular-shaped O2+ ion beams with different amounts of projection beam edge blur were formed in the X and Y directions by using a limiting mask between the ion source and projection mask. Gallium-contamination-free STEM sample preparation (rough, medium, and fine milling) was demonstrated using a projection ion beam optical system and three types of rectangular-shaped oxygen ion beams.","PeriodicalId":17652,"journal":{"name":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","volume":"49 1","pages":"054003"},"PeriodicalIF":0.0000,"publicationDate":"2020-09-09","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Ga-contamination-free scanning transmission electron microscope sample preparation by rectangular-shaped oxygen-ion-beam thinning using projection ion beam optical system\",\"authors\":\"H. Shichi, S. Tomimatsu\",\"doi\":\"10.1116/6.0000297\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Rectangular-shaped oxygen O2+ ion beam thinning for scanning transmission electron microscope (STEM) sample preparation was investigated using a projection ion beam optical system equipped with a duoplasmatron gas ion source. The ion current can be increased by increasing the area of the rectangular-shaped oxygen ion beam and thereby overcome the low brightness of the ion source. Rectangular-shaped O2+ ion beams with different amounts of projection beam edge blur were formed in the X and Y directions by using a limiting mask between the ion source and projection mask. Gallium-contamination-free STEM sample preparation (rough, medium, and fine milling) was demonstrated using a projection ion beam optical system and three types of rectangular-shaped oxygen ion beams.\",\"PeriodicalId\":17652,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"volume\":\"49 1\",\"pages\":\"054003\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2020-09-09\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0000297\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0000297","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Ga-contamination-free scanning transmission electron microscope sample preparation by rectangular-shaped oxygen-ion-beam thinning using projection ion beam optical system
Rectangular-shaped oxygen O2+ ion beam thinning for scanning transmission electron microscope (STEM) sample preparation was investigated using a projection ion beam optical system equipped with a duoplasmatron gas ion source. The ion current can be increased by increasing the area of the rectangular-shaped oxygen ion beam and thereby overcome the low brightness of the ion source. Rectangular-shaped O2+ ion beams with different amounts of projection beam edge blur were formed in the X and Y directions by using a limiting mask between the ion source and projection mask. Gallium-contamination-free STEM sample preparation (rough, medium, and fine milling) was demonstrated using a projection ion beam optical system and three types of rectangular-shaped oxygen ion beams.