退火、掺杂对氧化锌薄膜性能和功能的影响审查

E. Ugwu
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引用次数: 4

摘要

本文综述了不同生长技术(如溶胶-凝胶生长技术)对氧化锌薄膜结构和光学性能的影响。采用SEM、XRD对薄膜的结构和光学性质进行了表征,并分别采用TE和TM导模光谱、UV - VIS-NIR (HR4000Ocean Optics)和UV -可见光光谱进行了表征。从结果可以清楚地观察到薄膜的形貌和晶体结构特征,虽然掺杂元素含量的增加会影响薄膜的衍射峰轻微向低角度侧偏移,但随着掺杂元素浓度的增加,薄膜的c晶格减少,薄膜的晶体结构会恶化。在不同温度退火和掺杂浓度变化时,材料的带隙也会发生变化。该薄膜在不同的电磁波波谱区域具有较低的吸光度和较高的透射率。
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The Effect of Annealing, Doping on the Properties and Functionality of Zinc Oxide Thin Film; Review
The review of the effect of annealing and doping zinc oxide thin films on both the struc - tural and optical properties has been carried out for different growth techniques such as sol–gel growth technique. The structural and optical properties were carried out using thin films were characterized SEM, XRD while TE and TM guided mode spectra, UV– VIS–NIR (HR4000Ocean Optics) and UV–Visible spectrometry were used accordingly respectively. From the results, it was clearly observed the both the morphological and the crystal characteristics structural characteristic, although increase in the percent of doping element affected it as the diffraction peak was shifts slightly to a lower angle side with report that crystal structure of the film deteriorate at a higher doping concentration of doping element as it decreases the c-lattice. There was also adjustment on the band gap of the material when it was annealed at various temperatures and also when the dop - ing concentration was varied. The film exhibited lower absorbance, high transmittance depend on the regions of electromagnetic wave spectra.
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