面向重丝键合工艺优化的先进键合界面检测技术

S. Schmitz, N. Araki, M. Eto, Tadashige Yamaguchi, T. Haibara, Takashi Yamada
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引用次数: 0

摘要

本文重点分析了重丝键合触头的界面形成。提出了一种结合新型BAMFIT (Bondtec加速机械疲劳界面测试)方法、断裂模式三维测量和适应性评估算法应用的测试方法。与剪切试验不同,剪切试验仅通过剪切凿子测量机械变形的阻力,测试方法直接测量连接区域。准确地知道粘合面积的百分比允许用户微调粘合参数,以紧密匹配所使用的材料系统,以及识别材料行为的差异。为了找出这些细微的差异,研究了4种线材类型,它们基本上具有非常相似的机械性能。使用DoE(实验设计)对所有使用的金属丝材料进行了参数研究。除测定粘接接触变形外,还测定了剪切力、剪切强度和粘接界面面积百分比。通过对现有数据的分析,利用DoE软件对工艺过程进行建模,推导出线材的工艺窗口。在这里,它显示了连接区域的准确知识-由本出版物中提出的测试方法决定-允许更准确地决策有关电线材料的使用。此外,它可以显示在这种研究中,重钢丝剪切试验达到其极限。
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Advanced bonding interface inspection technique for process optimization in heavy wire bonding
This article focuses on the analysis of the interface formation of heavy wire bonding contacts. A test methodology is presented which combines the novel BAMFIT (Bondtec Accelerated Mechanical Fatigue Interface Testing) method, the 3D measurement of fracture patterns and the application of adapted evaluation algorithms. Unlike the shear test, which only measures resistance to mechanical deformation by the shear chisel, the test methodology used directly measures the connected area. Precisely knowing the percentage of bonded area allows the user to fine-tune bonding parameters to closely match the material system being used as well as to identify differences in the material behaviour. In order to work out these subtle differences, 4 wire types were investigated, which basically have very similar mechanical properties. Parameter studies using DoE (design-of-experiment) were performed for all wire materials used. In addition to the deformation of the bonding contacts, shear forces, shear strengths and the percentage of bonded interface area were determined. After analyzing the available data and modeling the process with DoE software, process windows were derived for the wire materials. Here, it was shown that accurate knowledge of the connected area – determined by the testing methodology presented in this publication – allows more accurate decision making regarding the wire material to be used. Furthermore, it could be shown where the heavy wire shear test reaches its limits in such investigations.
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