贵金属/硅结的性质

A. Cros , P. Muret
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引用次数: 32

摘要

本文综述了沉积在硅衬底上的贵金属层的性质。给出了界面的微观性质。讨论了这些结果与宏观现象的相关性,如扩散,金属层的粘附和结的电学性质。
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Properties of noble-metal/silicon junctions

We review the properties of noble-metal layers deposited on silicon substrates. The microscopic properties of the interface are presented. The relevance of these results to macroscopic phenomena like diffusion, adherence of the metal layer and electrical properties of the junctions is discussed.

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