{"title":"振动电容:在半导体气体传感器研究中的应用","authors":"J. Mizsei","doi":"10.1109/ICSENS.2004.1426328","DOIUrl":null,"url":null,"abstract":"Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors. That is why the vibrating capacitor method is such a valuable tool for investigating gas sensor materials. The article summarises the capabilities of the vibrating capacitor from the simplest, adsorption induced work-function tests to the scanning vibrating capacitor yielded olfactory pictures and chemical pictures. After the brief summary, the latest results are discussed in detail, such as olfactory pictures from semiconductor surfaces, chemical pictures from thin SnO/sub 2/ layer produced by atomic layer epitaxy, and chemical pictures from Pd nanolayer (activator) covered surfaces.","PeriodicalId":20476,"journal":{"name":"Proceedings of IEEE Sensors, 2004.","volume":"38 1","pages":"947-950 vol.2"},"PeriodicalIF":0.0000,"publicationDate":"2004-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Vibrating capacitor: applications in the research of semiconductor gas sensors\",\"authors\":\"J. Mizsei\",\"doi\":\"10.1109/ICSENS.2004.1426328\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors. That is why the vibrating capacitor method is such a valuable tool for investigating gas sensor materials. The article summarises the capabilities of the vibrating capacitor from the simplest, adsorption induced work-function tests to the scanning vibrating capacitor yielded olfactory pictures and chemical pictures. After the brief summary, the latest results are discussed in detail, such as olfactory pictures from semiconductor surfaces, chemical pictures from thin SnO/sub 2/ layer produced by atomic layer epitaxy, and chemical pictures from Pd nanolayer (activator) covered surfaces.\",\"PeriodicalId\":20476,\"journal\":{\"name\":\"Proceedings of IEEE Sensors, 2004.\",\"volume\":\"38 1\",\"pages\":\"947-950 vol.2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2004-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Proceedings of IEEE Sensors, 2004.\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICSENS.2004.1426328\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2004.1426328","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Vibrating capacitor: applications in the research of semiconductor gas sensors
Adsorption usually results in work function shifts on catalytically active surfaces such as semiconductor gas sensors. That is why the vibrating capacitor method is such a valuable tool for investigating gas sensor materials. The article summarises the capabilities of the vibrating capacitor from the simplest, adsorption induced work-function tests to the scanning vibrating capacitor yielded olfactory pictures and chemical pictures. After the brief summary, the latest results are discussed in detail, such as olfactory pictures from semiconductor surfaces, chemical pictures from thin SnO/sub 2/ layer produced by atomic layer epitaxy, and chemical pictures from Pd nanolayer (activator) covered surfaces.
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