{"title":"氩气和混合气体在常压下有较大的间隙,RF-DBD辉光放电","authors":"B. Li, Q. Chen, Z. Liu, Z. Wang","doi":"10.1109/INEC.2010.5424652","DOIUrl":null,"url":null,"abstract":"In this study, a large gap of the distance between electrodes (≫5.5 mm) of Ar atmospheric pressure glow discharge (APGD) in radio frequency dielectric barrier discharges (RF-DBD) is achieved. The I-V characteristic and I-phase angle characteristic of RF-DBD are studied in detail. The discharge characteristic of Ar mixed with N2, O2 and Air, respectively, was diagnosed by the optical emission spectrum. The Lissajous plot was measured to calculate the effective power of the discharges. It is obtained that the mixture gas ratio in RF-DBD is seriously affected the discharge stability and the discharge mode. It concludes that this adjustable manufacture of the RF-DBD is capable in wide applications for material modifications and polymerizations.","PeriodicalId":6390,"journal":{"name":"2010 3rd International Nanoelectronics Conference (INEC)","volume":"65 1","pages":"232-233"},"PeriodicalIF":0.0000,"publicationDate":"2010-03-04","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A large gap of Ar and mixed gas at atmospheric pressure RF-DBD glow discharges\",\"authors\":\"B. Li, Q. Chen, Z. Liu, Z. Wang\",\"doi\":\"10.1109/INEC.2010.5424652\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this study, a large gap of the distance between electrodes (≫5.5 mm) of Ar atmospheric pressure glow discharge (APGD) in radio frequency dielectric barrier discharges (RF-DBD) is achieved. The I-V characteristic and I-phase angle characteristic of RF-DBD are studied in detail. The discharge characteristic of Ar mixed with N2, O2 and Air, respectively, was diagnosed by the optical emission spectrum. The Lissajous plot was measured to calculate the effective power of the discharges. It is obtained that the mixture gas ratio in RF-DBD is seriously affected the discharge stability and the discharge mode. It concludes that this adjustable manufacture of the RF-DBD is capable in wide applications for material modifications and polymerizations.\",\"PeriodicalId\":6390,\"journal\":{\"name\":\"2010 3rd International Nanoelectronics Conference (INEC)\",\"volume\":\"65 1\",\"pages\":\"232-233\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2010-03-04\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2010 3rd International Nanoelectronics Conference (INEC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/INEC.2010.5424652\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2010 3rd International Nanoelectronics Conference (INEC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/INEC.2010.5424652","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A large gap of Ar and mixed gas at atmospheric pressure RF-DBD glow discharges
In this study, a large gap of the distance between electrodes (≫5.5 mm) of Ar atmospheric pressure glow discharge (APGD) in radio frequency dielectric barrier discharges (RF-DBD) is achieved. The I-V characteristic and I-phase angle characteristic of RF-DBD are studied in detail. The discharge characteristic of Ar mixed with N2, O2 and Air, respectively, was diagnosed by the optical emission spectrum. The Lissajous plot was measured to calculate the effective power of the discharges. It is obtained that the mixture gas ratio in RF-DBD is seriously affected the discharge stability and the discharge mode. It concludes that this adjustable manufacture of the RF-DBD is capable in wide applications for material modifications and polymerizations.