{"title":"利用微球玻璃壳低语走廊模式谐振器进行皮米级尺寸传感","authors":"Vedant Sumaria, S. Tadigadapa","doi":"10.1109/Transducers50396.2021.9495496","DOIUrl":null,"url":null,"abstract":"We present sub-picometer displacement measurement using a high quality-factor (Q) whispering gallery mode (WGM) borosilicate glass microspherical resonators. Calibrating the expansion of the WGM resonator using a laser Doppler vibrometer (LDV) upon absorption of thermal radiation, 3.7 pm of dimensional change can be experimentally resolved using a 1 mm diameter and $8.4\\ \\mu \\mathrm{m}$ thick glass microspherical shell resonator. COMSOL models presented show that an unprecedented displacement resolution of 89 fm is possible for a microspherical shell resonator with a diameter of 2 mm and a thickness of $2\\ \\mu \\mathrm{m}$.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"36 1","pages":"1104-1107"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Picometer Level Dimensional Sensing Using Microspherical Glass Shell Whispering Gallery Mode Resonators\",\"authors\":\"Vedant Sumaria, S. Tadigadapa\",\"doi\":\"10.1109/Transducers50396.2021.9495496\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"We present sub-picometer displacement measurement using a high quality-factor (Q) whispering gallery mode (WGM) borosilicate glass microspherical resonators. Calibrating the expansion of the WGM resonator using a laser Doppler vibrometer (LDV) upon absorption of thermal radiation, 3.7 pm of dimensional change can be experimentally resolved using a 1 mm diameter and $8.4\\\\ \\\\mu \\\\mathrm{m}$ thick glass microspherical shell resonator. COMSOL models presented show that an unprecedented displacement resolution of 89 fm is possible for a microspherical shell resonator with a diameter of 2 mm and a thickness of $2\\\\ \\\\mu \\\\mathrm{m}$.\",\"PeriodicalId\":6814,\"journal\":{\"name\":\"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)\",\"volume\":\"36 1\",\"pages\":\"1104-1107\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-06-20\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/Transducers50396.2021.9495496\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/Transducers50396.2021.9495496","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
We present sub-picometer displacement measurement using a high quality-factor (Q) whispering gallery mode (WGM) borosilicate glass microspherical resonators. Calibrating the expansion of the WGM resonator using a laser Doppler vibrometer (LDV) upon absorption of thermal radiation, 3.7 pm of dimensional change can be experimentally resolved using a 1 mm diameter and $8.4\ \mu \mathrm{m}$ thick glass microspherical shell resonator. COMSOL models presented show that an unprecedented displacement resolution of 89 fm is possible for a microspherical shell resonator with a diameter of 2 mm and a thickness of $2\ \mu \mathrm{m}$.
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