气团离子非接触陨石坑硬度测量方法的发展

2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO) Pub Date : 2016-08-01 DOI:10.1109/NANO.2016.7751355

N. Toyoda

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引用次数: 1

摘要

采用气团离子束(GCIB)形成陨石坑进行薄膜硬度的非接触测量。选择尺寸的Ar团簇离子形成的弹坑内径随着膜硬度的反立方根而减小。当总加速度能量相同时，星团大小对弹坑内径没有影响。此外，高电离电子电压(Ve)导致多电荷GCIB形成的坑深和坑径分布较宽。

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Development of non-contact hardness measurements with crater formations by gas cluster ions

Crater formations with gas cluster ion beam (GCIB) were used for non-contact hardness measurement of thin films. The crater inner diameter formed with size-selected Ar cluster ions decreased with inverse cube root of film hardness. When the total acceleration energy was the same, cluster size did not affect the crater inner diameter. In addition, high ionization electron voltage (Ve) cause wide distribution of crater depth and diameter due to multiply charged GCIB.

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2016 IEEE 16th International Conference on Nanotechnology (IEEE-NANO)

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