非晶ingazno薄膜晶体管高温负偏置应力诱导的异常跨导增强效应

Bo-Wei Chen, T. Chang, Shin-Ping Huang, Chih-Hung Pan, Y. Hung
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引用次数: 1

摘要

本文研究了负偏置应力在高温下引起非晶InGaZnO薄膜晶体管(TFTs)异常降解的影响。利用漏极电流-门电压(ID-VG)和电容电压(C-V)测量分析了退化机理。高温负偏置应力不仅会导致ID-VG负平行位移,还会导致C-V畸变。这是由于对称的空穴捕获效应在漏极和源极附近都有降低势垒的作用。此外,由于源极和漏极附近的局部空穴捕获,导通电流和亚阈值摆幅都将得到改善。
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Abnormal transconductance enhancement effects induced by negative bias-stress at high temperature in amorphous-InGaZnO thin-film transistors
This letter investigates the effect of negative bias stress induced abnormal degradation in amorphous InGaZnO thin-film transistors (TFTs) at high temperature. Drain current-gate voltage (ID-VG) and capacitance-voltage (C-V) measurements are employed to analyze degradation mechanism. High temperature negative bias stress lead to not only a negative parallel shift in ID-VG but also a C-V distortion at off-state. This attributes to a barrier lowering effect nearby both drain and source sides according to symmetrical hole-trapping effect. Furthermore, both on-current and subthreshold swing will be improved due to the localized hole-trapping near source and drain.
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