出版人注:“由切片锯和湿化学蚀刻制造的硅场发射体”[J]。真空吸尘器。科学。抛光工艺。B 39, 013205 (2021)]

{"title":"出版人注:“由切片锯和湿化学蚀刻制造的硅场发射体”[J]。真空吸尘器。科学。抛光工艺。B 39, 013205 (2021)]","authors":"S. Edler, A. Schels, J. Biba, W. Hansch, M. Bachmann, F. Düsberg, Marinus Werber, C. Langer, M. Meyer, David von Bergen, A. Pahlke","doi":"10.1116/6.0000974","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":17652,"journal":{"name":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","volume":"40 1","pages":"027001"},"PeriodicalIF":0.0000,"publicationDate":"2021-03-17","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Publisher’s Note: “Silicon field emitters fabricated by dicing-saw and wet-chemical-etching” [J. Vac. Sci. Technol. B 39, 013205 (2021)]\",\"authors\":\"S. Edler, A. Schels, J. Biba, W. Hansch, M. Bachmann, F. Düsberg, Marinus Werber, C. Langer, M. Meyer, David von Bergen, A. Pahlke\",\"doi\":\"10.1116/6.0000974\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":17652,\"journal\":{\"name\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"volume\":\"40 1\",\"pages\":\"027001\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2021-03-17\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1116/6.0000974\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"Journal of Vacuum Science & Technology. B. Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1116/6.0000974","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}