不锈钢在空心阳极脉冲偏压非自持气体放电中的等离子体氮化

I. Misiruk, O. Tymoshenko, A. Taran, S. Romaniuk, I. Garkusha, G. Nikolaychuk
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引用次数: 0

摘要

介绍了aisi430不锈钢样品的等离子渗氮试验结果。在脉冲偏置模式、重复频率为50 kHz的Bulat型装置中,在空心阳极非自燃气体放电氮等离子体中进行了氮化过程。通过x射线衍射(XRD)分析了涂层的相组成。利用扫描电子显微镜(SEM)监测表面形貌,并用能量色散x射线分析(EDX)检测化学成分。采用维氏硬度作为判定扩散区厚度和与钢基体边界的标准。
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Plasma Nitriding of Stainless Steel in Non-Self-Sustained Gas Discharge with Hollow Anode and Pulsed Bias
Results on plasma nitriding of AISI 430 stainless steel samples have been presented. The nitriding process has been carried out in nitrogen plasma of non-self-sustained gas discharge with hollow anode in Bulat type device with pulsed biasing mode and repetition frequency 50 kHz. The phase composition of the obtained coatings was analyzed via X-ray diffraction (XRD). The surface morphology was monitored by scanning electron microscopy (SEM) whereas chemical composition was examined by using energy dispersive X-ray analysis (EDX). Vickers hardness was used as criteria to determine the diffusion zone thickness and the boundary to the steel base.
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