带可调弹簧的参数驱动谐振微镜扫描仪

2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan) Pub Date : 2013-03-07 DOI:10.1109/MEMSYS.2013.6474308

Jinhyeok Kim, Y. Kawai, N. Inomata, T. Ono

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引用次数: 7

摘要

在本文中，我们设计、制作并评估了一种能够利用参数放大放大振动幅度的谐振微镜。此外，电热致动器产生的应力可以改变支撑微镜的扭力杆的弹簧常数，从而可以调整扭转模态的谐振频率。通过在电热执行器上施加泵送信号，证明了扭转模态振动的参数放大。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Parametrically driven resonant micro-mirror scanner with tunable springs

In this paper, we design, fabricate and evaluate a resonant micro-mirror able to amplify the vibration amplitude using parametric amplification. In addition, the spring constant of torsion bars supporting the micro-mirror can be varied by stress generated using an electrothermal actuator, which can tune the resonant frequency of the torsional modes. The parametric amplification of the vibration of the torsional mode is demonstrated by applying a pumping signal using the electrothermal actuator.

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2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS 2013) : Taipei, Taiwan, 20-24 January 2013. IEEE International Conference on Micro Electro Mechanical Systems (26th : 2013 : Taipei, Taiwan)

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