通过控制杂质浓度,PVT法生长4H-SiC单晶的缺陷致发光猝灭

Compounds Pub Date : 2022-03-02 DOI:10.3390/compounds2010006
Seul-Ki Kim, E. Y. Jung, Myung-Hyun Lee
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引用次数: 2

摘要

研究了杂质对碳化硅(SiC)结构缺陷的影响,采用温度相关光致发光(PL)测量方法测定了碳化硅(SiC)的发光性能。采用三种不同的3C-SiC起始材料,在100 Pa高温氩气环境中采用物理气相输运法制备了4H-SiC单晶。利用拉曼光谱、x射线衍射、电感耦合等离子体原子发射光谱(ICP-OES)、紫外-可见-近红外分光光度法和PL测量证实了杂质水平与光学和荧光性质之间的相关性。三种4H-SiC单晶均存在发光强度,低温时的发光强度最高。在低于50 K的温度下,在420 nm和580 nm处观察到两个显著的PL发射峰。这些发射峰来源于单个4H-SiC晶体中N、Al和B杂质的掺入,并得到ICP-OES的支持。在4H-SiC单晶中掺入氮、硼和铝,在420 nm和580 nm处发生了供体-受体对重组。本文的研究结果提供了基于低温PL的证据,表明单4H-SiC晶体的PL发射机制主要与缺陷浓度引起的跃迁有关。
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Defect-Induced Luminescence Quenching of 4H-SiC Single Crystal Grown by PVT Method through a Control of Incorporated Impurity Concentration
The structural defect effect of impurities on silicon carbide (SiC) was studied to determine the luminescence properties with temperature-dependent photoluminescence (PL) measurements. Single 4H-SiC crystals were fabricated using three different 3C-SiC starting materials and the physical vapor transport method at a high temperature and 100 Pa in an argon atmosphere. The correlation between the impurity levels and the optical and fluorescent properties was confirmed using Raman spectroscopy, X-ray diffraction, inductively coupled plasma atomic emission spectroscopy (ICP-OES), UV-Vis-NIR spectrophotometry, and PL measurements. The PL intensity was observed in all three single 4H-SiC crystals, with the highest intensities at low temperatures. Two prominent PL emission peaks at 420 and 580 nm were observed at temperatures below 50 K. These emission peaks originated from the impurity concentration due to the incorporation of N, Al, and B in the single 4H-SiC crystals and were supported by ICP-OES. The emission peaks at 420 and 580 nm occurred due to donor–acceptor-pair recombination through the incorporated concentrations of nitrogen, boron, and aluminum in the single 4H-SiC crystals. The results of the present work provide evidence based on the low-temperature PL that the mechanism of PL emission in single 4H-SiC crystals is mainly related to the transitions due to defect concentration.
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