W含量对磁控共溅射制备Ni-W硬膜微观结构和表面形貌的影响

Amir R. Esmaeili, N. Mir, R. Mohammadi
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引用次数: 1

摘要

由于其独特的机械、摩擦学、热学和防腐性能,镍钨(Ni-W)合金薄膜已成为许多工业应用中不可或缺的材料。本文研究了W含量对Ni-W薄膜微观结构和力学性能的影响。通过在涂有薄缓冲层(~ 20 nm)钛(Ti)的硅片上共溅射Ni和W,制备了从纯Ni到纯W的6种Ni-W涂层。样品使用能量色散光谱、x射线衍射、扫描电子显微镜、原子力显微镜和微压痕进行了表征。结果表明:Ni-W薄膜的硬度主要是W含量的函数,W的含量改变了样品的微观组织和表面形貌;当W浓度小于40 at时。%时,富镍试样呈面心立方结构,硬度随W含量的增加而增加。对于40 < W < 55 at的样品。%时,硬度对W含量的敏感性明显降低,这可能是由于非晶相的存在。最后,研究了添加W对含55 ~ 80 at的试样硬度的影响。% W比W < 40的值大两倍。这种额外的硬化效应可归因于固溶硬化体心立方W相的优势和两种过渡金属之间的电子相互作用。这种硬度的急剧增加使Ni-79 at的硬度达到21.9±2.0 GPa。% W薄膜。研究结果表明,固溶体强化可以被认为是这些薄膜的主要硬化机制。
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Influence of W content on microstructure and surface morphology of hard Ni-W films fabricated by magnetron co-sputtering
Due to their unique mechanical, tribological, thermal, and anticorrosion properties, nickel-tungsten (Ni-W) alloy films have become indispensable for many industrial applications. The present study investigates the impact of W content on the microstructure and mechanical properties of Ni-W thin films. By co-sputtering of Ni and W on silicon wafers coated with a thin buffer layer (∼20 nm) of titanium (Ti), six Ni-W coatings were fabricated, ranging from pure Ni to pure W. The samples were characterized using energy dispersive spectroscopy, x-ray diffraction, scanning electron microscopy, atomic force microscopy, and microindentation. The results show that hardness of the Ni-W films is primarily a function of the W content, which changes the microstructure and surface morphology of the samples. When W concentration is smaller than 40 at. %, the Ni-rich samples have a face-centered cubic structure and the hardness increases with the W content. For the samples having 40 < W < 55 at. %, the sensitivity of the hardness to the W content becomes markedly low, which could be due to the presence of an amorphous phase. Finally, the impact of W addition on the hardness of the samples containing 55–80 at. % W is two times greater than that of W < 40 at. %. The extra hardening effect could be attributed to the dominancy of a solid solution hardened body-centered cubic W phase and electronic interaction between two transition metals. This sharp increase in the hardness leads to obtaining a high hardness of 21.9 ± 2.0 GPa for the Ni-79 at. % W film. The findings of this study show that solid solution strengthening could be considered the main hardening mechanism of these films.
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