Z. Fang, S. Haque, Jintian Lin, Rongbo Wu, Jianhao Zhang, Min Wang, Muniyat Rafa, Ya Cheng, T. Lu
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Monolithic integration of an electrically tunable ultrahigh-Q optomechanical device
We demonstrate an electrically tunable ultrahigh-Q optomechanical device (mechanical Q~2.76×105) for the mechanical mode at 100.32 MHz by monolithically integrating an on-chip lithium niobate microresonator (optical Q~107) with a pair of in-plane microelectrodes.
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