采用合成六方氮化硼栅极电介质的准独立石墨烯上的高性能、大面积石墨烯晶体管

M. Hollander, A. Agrawal, M. Bresnehan, M. Labella, K. Trumbull, R. Cavalero, S. Datta, J. A. Robinson
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摘要

近年来,六方氮化硼(h-BN)作为一种用于石墨烯基电子器件的材料引起了人们的兴趣,当考虑到介电材料在石墨烯载流子中引入额外散射源的影响时,其超光滑的二维结构、缺乏悬空键和高能量表面光学声子模式是可取的。初步研究表明,使用h-BN代替SiO2支撑衬底可以使器件性能提高2-3倍[1,2],这表明h-BN可能是石墨烯器件顶栅介质的绝佳选择。在这项工作中,我们首次将h-BN与准独立式石墨烯(QFEG)集成在一起,并展示了射频(RF)性能提高了2倍,以及迄今为止报道的h-BN集成石墨烯器件(25 GHz·μm)的最高fT·Lg产品。
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High performance, large area graphene transistors on quasi-free-standing graphene using synthetic hexagonal boron nitride gate dielectrics
In recent years, hexagonal boron nitride (h-BN) has gained interest as a material for use in graphene based electronics, where its ultra-smooth two-dimensional structure, lack of dangling bonds, and high energy surface optical phonon modes are desirable when considering the effect of dielectric materials in introducing additional sources of scattering for carriers within graphene. Initial work has indicated that use of h-BN in place of SiO2 supporting substrates can lead to 2-3x improvements in device performance [1,2], suggesting that h-BN may be an excellent choice as top-gate dielectric for graphene devices. In this work, we integrate h-BN with quasi-freestanding graphene (QFEG) for the first time and demonstrate a 2x improvement in radio frequency (RF) performance and the highest fT·Lg product yet reported for h-BN integrated graphene devices (25 GHz·μm).
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