软化学合成BST的新途径

A. Vincent, V. Grimal, F. Gervais, L. Ventura, N. Poirot
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引用次数: 0

摘要

本工作的目的是为BST的合成开辟一条新的途径。采用自旋镀膜的方法在定向LNO/Si衬底上制备了BST薄膜。用XRD测定了相纯度和可能的晶向。从详细的SEM图像讨论了BST的微观结构和织构,并通过电容测量证实了BST的性能。
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New route for BST synthesis by soft chemistry
The purpose of this work is to develop a new route for BST synthesis. BST thin film are produced by spin coating on an oriented LNO/Si substrate. The phase purity and possible crystalline orientation are determined by XRD. BST microstructure and texturation are discussed from detailed SEM images and capacitance measurement confirm the BST performances.
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