National Bureau of Standards, Special Publication

Preparation and certification of SRM-2530, ellipsometric parameters Δ and ψ and derived thickness and refractive index of a silicon dioxide layer on silicon

Pub Date : 1988-10-01 DOI: 10.6028/NBS.SP.260-109 G. A. Candela, D. Chandler-Horowitz, J. Marchiando, D. Novotny, Barbara J. Belzer, M. Croarkin

SURFACE POTENTIAL AS A LASER DAMAGE DIAGNOSTIC.

Pub Date : 1986-12-01 DOI: 10.1520/STP23113S M. Becker, J. Kardach, A. Stewart, A. Guenther

CHARGE EMISSION AND ACCUMULATION IN MULTIPLE-PULSE DAMAGE OF SILICON.

Pub Date : 1986-12-01 DOI: 10.1520/STP23114S Y. Jhee, M. Becker, R. Walser