Preparation and certification of SRM-2530, ellipsometric parameters Δ and ψ and derived thickness and refractive index of a silicon dioxide layer on silicon
G. A. Candela, D. Chandler-Horowitz, J. Marchiando, D. Novotny, Barbara J. Belzer, M. Croarkin
{"title":"Preparation and certification of SRM-2530, ellipsometric parameters Δ and ψ and derived thickness and refractive index of a silicon dioxide layer on silicon","authors":"G. A. Candela, D. Chandler-Horowitz, J. Marchiando, D. Novotny, Barbara J. Belzer, M. Croarkin","doi":"10.6028/NBS.SP.260-109","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":212922,"journal":{"name":"National Bureau of Standards, Special Publication","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1988-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"12","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"National Bureau of Standards, Special Publication","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.6028/NBS.SP.260-109","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}