Digest of Papers Microprocesses and Nanotechnology 2000. 2000 International Microprocesses and Nanotechnology Conference (IEEE Cat. No.00EX387)

High aspect-ratio microchip-based capillary electrophoresis device using chemically machinable photosensitive glass substrate

Pub Date : 2000-07-11 DOI: 10.1109/IMNC.2000.872626 T. Fujimura, S. Etoh, S. Ishikawa, A. Ikeda, R. Hattori, Y. Kuroki

A new quantum dot formation process using wet etching of poly-Si along grain boundaries

Pub Date : 2000-07-11 DOI: 10.1109/IMNC.2000.872738 Seong-jong Yoo, Jongho Lee, Hyungcheol Shin

Formation of micro eaves analyzed by energy balance model at threefold of Cu film/DFR/Ni plating solution

Pub Date : 2000-07-11 DOI: 10.1109/IMNC.2000.872636 H. Yoshida, T. Nakamura, Y. Kawakami, A. Kawai