2007 International Symposium on Semiconductor Manufacturing

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Spacer etch optimization on high density memory products to eliminate core leakage failures

Pub Date : 2007-10-01 DOI: 10.1109/ISSM.2007.4446867 E. Dharmarajan, Shengnian Song, L. Mclaughlin, J. Guan, J. Gazda, E. Lin, W. Qi, H. Shiraiwa, J. Hussey, J. Lansford, B. Banerjee

Real option analysis for capacity investment planning for semiconductor manufacturing

Pub Date : 2007-10-01 DOI: 10.1109/ISSM.2007.4446823 Chih-Chiang Chen, Yu-Shian Chiang, Chen-Fu Chien

Fine edge and bevel film stripping process by novel wet cleaning tool beyond 45nm node

Pub Date : 2007-10-01 DOI: 10.1109/ISSM.2007.4446885 Y. Ogawa, H. Nagashima, Y. Yoshimizu, H. Tomita, T. Kishimoto, K. Miya, A. Izumi

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