Y. Ogawa, H. Nagashima, Y. Yoshimizu, H. Tomita, T. Kishimoto, K. Miya, A. Izumi
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引用次数: 2
Abstract
In this paper, we indicate the difficulty of high-k film stripping of edge cut area using conventional bevel and backside etching tool and propose a fine edge cut control process using a novel bevel and backside etching tool with edge dispense nozzles.
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