An accurate numerical approach of 2D comb structured MEMS capacitor

Abstract

In this paper, an efficient numerical approach, which is a combination of FDTD method and the body-fitted grid generation method with moving boundaries, is presented for the analysis of 2D comb structured MEMS variable capacitors with accelerated motions. By using this technique, it is possible to analyze the combined effect of the mechanical and electrical equations. Here, a relation between the displacements of the plates and the bias voltage is derived. For validation, the theoretical and the numerical results are compared. Both results are in very good agreement. The development of this numerical method is capable to determine the accuracy of the transient effect.