Real case studies of fast wafer level reliability (FWLR) EM test as process reliability monitor methodology

A. Yap, T.W.H. Ling, H. Yap, B. H. Lim, Y. Tan, K. Lo
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引用次数: 1

Abstract

In this paper, we present real case studies to illustrate SWEAT and ISOT EM tests effectiveness as reliability screens and monitoring methodology.
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快速晶圆级可靠性(FWLR)电磁测试作为过程可靠性监测方法的实际案例研究
在本文中,我们提出了真实的案例研究来说明SWEAT和ISOT EM测试作为可靠性筛选和监测方法的有效性。
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