{"title":"Free space optical components and systems based on LIGA technology","authors":"J. Mohr","doi":"10.1109/OMEMS.2000.879668","DOIUrl":null,"url":null,"abstract":"Due to its characteristics, LIGA technology is well suited to build up free space optical components with hybrid integration of optical elements by passive alignment. This is demonstrated by passive optical components and electro-opto-mechanical devices for telecommunication and sensor application.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"48 8","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/OMEMS.2000.879668","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Due to its characteristics, LIGA technology is well suited to build up free space optical components with hybrid integration of optical elements by passive alignment. This is demonstrated by passive optical components and electro-opto-mechanical devices for telecommunication and sensor application.
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