Development of 4/spl times/4 MEMS optical switch

Y. Kato, K. Mori, T. Mase, A. Takahashi, O. Imaki, R. Kaku
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引用次数: 5

Abstract

We present a design and experimental results of a 4/spl times/4 matrix optical switch that is suitable for passive alignment process, in which thick photoresist technology is utilized for the fabrication of tall vertical mirrors.
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4/ sp1次/4 MEMS光开关的研制
本文提出了一种适用于无源对准工艺的4/spl倍/4矩阵光开关的设计和实验结果,其中厚光刻胶技术用于制造高垂直反射镜。
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