Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879651
J. Rantala, S. Juuso, R. Levy, L. Kivimaki, M. Descour
The liquid phase deposition and direct UV writing method is applied for the fabrication of optical and mechanical structures into a photosensitive hybrid glass material. High optical quality thick films and structures are fabricated for the realization of a micro-optical table.
{"title":"Directly patternable thick film hybrid glass materials for micro-opto-mechanical structures","authors":"J. Rantala, S. Juuso, R. Levy, L. Kivimaki, M. Descour","doi":"10.1109/OMEMS.2000.879651","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879651","url":null,"abstract":"The liquid phase deposition and direct UV writing method is applied for the fabrication of optical and mechanical structures into a photosensitive hybrid glass material. High optical quality thick films and structures are fabricated for the realization of a micro-optical table.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"1 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115274920","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879626
U. Srinivasan, M. Helmbrecht, C. Rembe, R. Muller, R. Howe
We describe the fluidic self-assembly of ultra-flat, single-crystal silicon micromirrors onto a surface micromachined actuator array. Sub-micron precision self-alignment of the mirrors onto the actuator platforms is achieved by pattern matching hydrophobic binding sites on the underside of the mirror and on the platform.
{"title":"Fluidic self-assembly of micromirrors onto surface micromachined actuators","authors":"U. Srinivasan, M. Helmbrecht, C. Rembe, R. Muller, R. Howe","doi":"10.1109/OMEMS.2000.879626","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879626","url":null,"abstract":"We describe the fluidic self-assembly of ultra-flat, single-crystal silicon micromirrors onto a surface micromachined actuator array. Sub-micron precision self-alignment of the mirrors onto the actuator platforms is achieved by pattern matching hydrophobic binding sites on the underside of the mirror and on the platform.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"140 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121422247","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879657
R. Supino, J. Talghader
The thermal time response of polysilicon microfilaments has been characterized at high and room temperatures. We have found cool down time constants that are several times lower at room temperature than for equivalent filaments at high temperatures. It is proposed that the cool down transient can be directly controlled by "substrate quenching," where the polysilicon filament is deflected into direct contact with the substrate. This could result in thermal responses several orders of magnitude faster than conventional structures and may have significant applications for high-speed microbolometer arrays.
{"title":"Thermal time response of microfilaments","authors":"R. Supino, J. Talghader","doi":"10.1109/OMEMS.2000.879657","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879657","url":null,"abstract":"The thermal time response of polysilicon microfilaments has been characterized at high and room temperatures. We have found cool down time constants that are several times lower at room temperature than for equivalent filaments at high temperatures. It is proposed that the cool down transient can be directly controlled by \"substrate quenching,\" where the polysilicon filament is deflected into direct contact with the substrate. This could result in thermal responses several orders of magnitude faster than conventional structures and may have significant applications for high-speed microbolometer arrays.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"32 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127883044","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879648
H. Kopola, J. Hiltunen, J. Hakkila, P. Karioja, T. Kololnoma, A. Karkkainen, J. Paaso, J. T. Rantala
The system design concept of a multi-technological module is introduced. A direct patternable hybrid material is demonstrated with a diffractive axicon lens. First experimental results of a 527 nm microcavity organic LED are shown. Fabrication and packaging solutions of several optical and optoelectronic microsystems are presented.
{"title":"Design, fabrication and packaging of micro-optical components and systems","authors":"H. Kopola, J. Hiltunen, J. Hakkila, P. Karioja, T. Kololnoma, A. Karkkainen, J. Paaso, J. T. Rantala","doi":"10.1109/OMEMS.2000.879648","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879648","url":null,"abstract":"The system design concept of a multi-technological module is introduced. A direct patternable hybrid material is demonstrated with a diffractive axicon lens. First experimental results of a 527 nm microcavity organic LED are shown. Fabrication and packaging solutions of several optical and optoelectronic microsystems are presented.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"17 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"130170237","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879614
C. Pu, L.Y. Lin, E. Goldstein, R. Tkach
The rapid evolving of optical transport systems into WDM systems has shown clear demands for functionalities inside the optical layer to manipulate the traffic on the wavelength basis. One such important functionality is to use optical add/drop multiplexers (OADM) to add and drop a subset of wavelengths from the transmission system without full opto-electronic regeneration. OADMs play important roles both in optical core networks and in regional access networks. In this paper we demonstrate a client configurable OADM using a 8/spl times/6 micro-machined matrix switch, and propose several OADM architectures to achieve client-configurability in different network environments.
{"title":"Micro-machined optical add/drop multiplexer with client configurability","authors":"C. Pu, L.Y. Lin, E. Goldstein, R. Tkach","doi":"10.1109/OMEMS.2000.879614","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879614","url":null,"abstract":"The rapid evolving of optical transport systems into WDM systems has shown clear demands for functionalities inside the optical layer to manipulate the traffic on the wavelength basis. One such important functionality is to use optical add/drop multiplexers (OADM) to add and drop a subset of wavelengths from the transmission system without full opto-electronic regeneration. OADMs play important roles both in optical core networks and in regional access networks. In this paper we demonstrate a client configurable OADM using a 8/spl times/6 micro-machined matrix switch, and propose several OADM architectures to achieve client-configurability in different network environments.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133961335","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879658
H. Heinzelmann, R. Eckert, J. M. Freyland, H. Gersen, G. Schurmann, W. Noell, U. Staufer, N. D. de Rooij
Microfabrication of probes for near-field optical microscopy is a promising approach to improve probe quality, reproducibility, and availability/cost. We report on cantilevered probes with integrated quartz tips allowing near-field optical imaging of single fluorophores with 32 nm lateral resolution.
{"title":"Microfabricated probes for near-field optical microscopy","authors":"H. Heinzelmann, R. Eckert, J. M. Freyland, H. Gersen, G. Schurmann, W. Noell, U. Staufer, N. D. de Rooij","doi":"10.1109/OMEMS.2000.879658","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879658","url":null,"abstract":"Microfabrication of probes for near-field optical microscopy is a promising approach to improve probe quality, reproducibility, and availability/cost. We report on cantilevered probes with integrated quartz tips allowing near-field optical imaging of single fluorophores with 32 nm lateral resolution.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"91 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115441520","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879635
X.M. Zhang, F. Chollet, F. Chau, C. Quan, A. Liu
This paper reports the design, fabrication, and testing of a monolithic integrated frequency shifter device using movable 3D-mirror to enable channel selection for WDM optics communication applications. The modification of Fabry-Perot microcavity length is implemented by micromechanical electrostatic actuators to enable a wide channel selection. The wavelength shifter is able to tune wavelength around 1.525-1.575 /spl mu/m to achieve the requirements of optical telecommunication band, and the flat transmission characteristic with low insertion losses over maximal wavelength range and minimal interchannel crosstalk between the coexisting transmission channels. Compared with the membrane mirror type of frequency shifter, the movable 3D-mirror frequency shifter overcomes the influence of residual stress within the membrane layers.
{"title":"Polysilicon 3D-mirror frequency shifter for WDM fibre-optic communication applications","authors":"X.M. Zhang, F. Chollet, F. Chau, C. Quan, A. Liu","doi":"10.1109/OMEMS.2000.879635","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879635","url":null,"abstract":"This paper reports the design, fabrication, and testing of a monolithic integrated frequency shifter device using movable 3D-mirror to enable channel selection for WDM optics communication applications. The modification of Fabry-Perot microcavity length is implemented by micromechanical electrostatic actuators to enable a wide channel selection. The wavelength shifter is able to tune wavelength around 1.525-1.575 /spl mu/m to achieve the requirements of optical telecommunication band, and the flat transmission characteristic with low insertion losses over maximal wavelength range and minimal interchannel crosstalk between the coexisting transmission channels. Compared with the membrane mirror type of frequency shifter, the movable 3D-mirror frequency shifter overcomes the influence of residual stress within the membrane layers.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"84 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124303848","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879620
T. Kurzweg, S. Levitan, J.A. Martinez, P. Marchand, D. Chiarulli
This paper presents the modeling and simulation of a 2/spl times/2 optical MEM switch using our system-level, mixed-technology CAD tool, Chatoyant. Simulations include operation in both the "cross" and "bar" states and the mechanical tolerancing of the system.
{"title":"Modeling and simulating optical MEM switches","authors":"T. Kurzweg, S. Levitan, J.A. Martinez, P. Marchand, D. Chiarulli","doi":"10.1109/OMEMS.2000.879620","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879620","url":null,"abstract":"This paper presents the modeling and simulation of a 2/spl times/2 optical MEM switch using our system-level, mixed-technology CAD tool, Chatoyant. Simulations include operation in both the \"cross\" and \"bar\" states and the mechanical tolerancing of the system.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"14 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125340323","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879606
K. Goossen
We discuss our so-called MARS (mechanical anti-reflection switch) devices, in which the membranes in the first devices have the same thickness and refractive index as an anti-reflection coating. By varying the air gap between odd and even multiples of /spl lambda//4 the reflectivity goes from high to near zero. This can be easily understood since if the air gap is zero it is of anti-reflecting and if it is /spl lambda//4 a high reflector mirror stack is formed, and since in any optical stack the reflectivity at the center wavelength is independent of additions of /spl lambda//2 to any layer. Six devices are described that only require variations on the layer structure of this simple mechanical structure, including changes in refractive index and thickness and additional layers. These are the simple data modulator requiring only on and off states, and the design methodology for trading insertion loss for wavelength range, a linear response device for producing harmonic signals, an attenuator requiring variable reflectivity that is independent of wavelength, a multi-electrode wavelength power equalizer, a gain slope compensator that has variable spectral tilt without attenuation changes, and a display design for operation over the entire visible spectrum.
{"title":"MEMS-based variable optical interference devices","authors":"K. Goossen","doi":"10.1109/OMEMS.2000.879606","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879606","url":null,"abstract":"We discuss our so-called MARS (mechanical anti-reflection switch) devices, in which the membranes in the first devices have the same thickness and refractive index as an anti-reflection coating. By varying the air gap between odd and even multiples of /spl lambda//4 the reflectivity goes from high to near zero. This can be easily understood since if the air gap is zero it is of anti-reflecting and if it is /spl lambda//4 a high reflector mirror stack is formed, and since in any optical stack the reflectivity at the center wavelength is independent of additions of /spl lambda//2 to any layer. Six devices are described that only require variations on the layer structure of this simple mechanical structure, including changes in refractive index and thickness and additional layers. These are the simple data modulator requiring only on and off states, and the design methodology for trading insertion loss for wavelength range, a linear response device for producing harmonic signals, an attenuator requiring variable reflectivity that is independent of wavelength, a multi-electrode wavelength power equalizer, a gain slope compensator that has variable spectral tilt without attenuation changes, and a display design for operation over the entire visible spectrum.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"836 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"114066486","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2000-08-21DOI: 10.1109/OMEMS.2000.879639
Choon-Sup Lee, Chul‐Hi Han
We propose a novel Si microlens array for enhancing the detectivity of IR detector using bulk micromachining technology. Boron diffusion and etching selectivity with respect to boron density in EDP etchant are utilized. Unlike conventional microlens, the focal length can be easily controlled with diffusion parameters such as diffusion temperature/time and diffusion window. In the experiment, the focal length can be controlled within 70% by varying the drive-in time between 0 and 8 hours. The measured focal spot size is 3.8 /spl mu/m of which a theoretical diffraction-limited spot size is 3.3 /spl mu/m. Arbitrary shaped-microlens can be fabricated by SiO/sub 2/ patterning. The peak-to-peak surface roughness is low, about 40 nm, due to self-stopping property.
{"title":"A novel refractive silicon microlens array using bulk micromachining technology","authors":"Choon-Sup Lee, Chul‐Hi Han","doi":"10.1109/OMEMS.2000.879639","DOIUrl":"https://doi.org/10.1109/OMEMS.2000.879639","url":null,"abstract":"We propose a novel Si microlens array for enhancing the detectivity of IR detector using bulk micromachining technology. Boron diffusion and etching selectivity with respect to boron density in EDP etchant are utilized. Unlike conventional microlens, the focal length can be easily controlled with diffusion parameters such as diffusion temperature/time and diffusion window. In the experiment, the focal length can be controlled within 70% by varying the drive-in time between 0 and 8 hours. The measured focal spot size is 3.8 /spl mu/m of which a theoretical diffraction-limited spot size is 3.3 /spl mu/m. Arbitrary shaped-microlens can be fabricated by SiO/sub 2/ patterning. The peak-to-peak surface roughness is low, about 40 nm, due to self-stopping property.","PeriodicalId":148819,"journal":{"name":"2000 IEEE/LEOS International Conference on Optical MEMS (Cat. No.00EX399)","volume":"5 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2000-08-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134287169","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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