Degradation effects in a-Si:H thin film transistors and their impact on circuit performance

D. Allee, L. Clark, R. Shringarpure, S. Venugopal, Z.P. Li, E. Bawolek
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引用次数: 6

Abstract

Amorphous silicon thin film transistors degrade with electrical stress. In particular, the threshold voltage increases significantly with positive gate voltages. The characteristics and mechanisms of the degradation are reviewed. The implications for various types of circuitry including active matrix backplanes, integrated drivers and general purpose digital circuitry are examined. A circuit modeling tool that enables the prediction of complex circuit degradation is presented. Finally, the similarity of degradation in amorphous silicon to negative bias temperature instability in crystalline PMOS is discussed along with potential approaches to reducing the degradation effects.
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a-Si:H薄膜晶体管的退化效应及其对电路性能的影响
非晶硅薄膜晶体管随着电应力而退化。特别是,门极电压为正时,阈值电压显著增加。综述了其降解的特点和机理。对各种类型的电路,包括有源矩阵背板,集成驱动器和通用数字电路的影响进行了检查。提出了一种能够预测复杂电路退化的电路建模工具。最后,讨论了非晶硅降解与晶体PMOS负偏置温度不稳定性的相似性,以及降低降解影响的潜在方法。
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