M. Tadjer, K. Hobart, J. Caldwell, M. Mastro, T. Feygelson, J. Butler, D. Alexson, F. Kub
{"title":"Investigation of nanocrystalline diamond films as UV transparent Ohmic contacts to GaN","authors":"M. Tadjer, K. Hobart, J. Caldwell, M. Mastro, T. Feygelson, J. Butler, D. Alexson, F. Kub","doi":"10.1109/ISDRS.2007.4422391","DOIUrl":null,"url":null,"abstract":"Nanocrystalline diamond (NCD) thin films are of interest due to their large bandgap and excellent thermal properties, which make them attractive for power device applications. The UV transparency of NCD films has been previously reported on Si and glass substrates. In addition, it has been demonstrated that NCD films grown on 4H-SiC exhibit a nearly ideal Schottky contact behavior. In this paper, the electrical contact properties of NCD films on GaN are investigated.","PeriodicalId":379313,"journal":{"name":"2007 International Semiconductor Device Research Symposium","volume":"15 4","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2007-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2007 International Semiconductor Device Research Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISDRS.2007.4422391","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
Nanocrystalline diamond (NCD) thin films are of interest due to their large bandgap and excellent thermal properties, which make them attractive for power device applications. The UV transparency of NCD films has been previously reported on Si and glass substrates. In addition, it has been demonstrated that NCD films grown on 4H-SiC exhibit a nearly ideal Schottky contact behavior. In this paper, the electrical contact properties of NCD films on GaN are investigated.
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