M. Badila, C. Codreanu, G. Brezeanu, B. Marinescu, A.M. Stoica
{"title":"Low parasitic elements and self aligned contacts technology for high frequency bipolar integrated circuits","authors":"M. Badila, C. Codreanu, G. Brezeanu, B. Marinescu, A.M. Stoica","doi":"10.1109/SMICND.1998.733817","DOIUrl":null,"url":null,"abstract":"A new high performance technology (with low parasitic elements) for high frequency bipolar circuits is proposed. The new technologies upgrade a classical \"LISA\" (local implantation self aligned) technology using a 14 masks process. The demonstrator circuits are a \"Gilbert\" cell, and some broad band high frequency amplifiers.","PeriodicalId":406922,"journal":{"name":"1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351)","volume":"36 4","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-10-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1998 International Semiconductor Conference. CAS'98 Proceedings (Cat. No.98TH8351)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.1998.733817","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A new high performance technology (with low parasitic elements) for high frequency bipolar circuits is proposed. The new technologies upgrade a classical "LISA" (local implantation self aligned) technology using a 14 masks process. The demonstrator circuits are a "Gilbert" cell, and some broad band high frequency amplifiers.
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