Ion chromatography analysis of fluorine contamination in wafer packaging materials

Abstract

So far, it is difficult to determine quantitatively very lower level fluorine in packaging materials in wafer fabrication. In this paper, we will introduce a rapid determination technique, Ion Chromatography, to determine trace of fluorine in packaging foam materials. Using this method, the concentration of fluorine in packaging foam materials can be quantitatively determined very lower level (<4 ng/cm/sup 2/). The advantages of this method are fast, accurate and repeatable of the results obtained. In this paper, we will introduce this determination method and discuss the details of sample preparation, determination conditions and results.