R. Mao, C.B. Li, Y. Zuo, B. Cheng, X. Teng, L. Luo, J.Z. Yu, Q.M. Wang
{"title":"Fabrication of low cost Si-based tunable high performance resonant cavity enhanced photodetectors","authors":"R. Mao, C.B. Li, Y. Zuo, B. Cheng, X. Teng, L. Luo, J.Z. Yu, Q.M. Wang","doi":"10.1109/GROUP4.2004.1416677","DOIUrl":null,"url":null,"abstract":"Low cost Si-based tunable InGaAs RCE photodetectors operating at 1.3/spl sim/1.6 /spl mu/m were fabricated using sol-gel bonding. A tuning range of 14.5 nm, a quantum efficiency of 44% at 1476 nm and a 3-dB bandwidth of 1.8 GHz were obtained.","PeriodicalId":299690,"journal":{"name":"First IEEE International Conference on Group IV Photonics, 2004.","volume":"30 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-29","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"First IEEE International Conference on Group IV Photonics, 2004.","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GROUP4.2004.1416677","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
Low cost Si-based tunable InGaAs RCE photodetectors operating at 1.3/spl sim/1.6 /spl mu/m were fabricated using sol-gel bonding. A tuning range of 14.5 nm, a quantum efficiency of 44% at 1476 nm and a 3-dB bandwidth of 1.8 GHz were obtained.
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