M. Kharkov, D. Kolodko, M. Kukushkina, A. Kaziev, O. Ogorodnikova, G.S. Lomonosov, A. Tumarkin
{"title":"Hot-target HiPIMS deposition of W-fuzz layers","authors":"M. Kharkov, D. Kolodko, M. Kukushkina, A. Kaziev, O. Ogorodnikova, G.S. Lomonosov, A. Tumarkin","doi":"10.56761/efre2022.c3-p-048002","DOIUrl":null,"url":null,"abstract":"Porous tungsten coatings were prepared by magnetron deposition in He environment. The depositions were carried out in HiPIMS mode with a frequency of 1 kHz and a pulse duration of 300 μs. The tungsten target was thermally insulated from the water-cooled cathode. The samples were mounted on three different distances from the target. Temperature of each sample was measured with a dedicated thermocouple and recorded throughout the deposition process. The structure of resulting W-fuzz layers is analyzed and discussed. The deposition rate of tungsten fuzz in a hot-target magnetron system operated in HiPIMS mode is shown to be ~100 nm/min.","PeriodicalId":156877,"journal":{"name":"8th International Congress on Energy Fluxes and Radiation Effects","volume":"3 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2022-11-14","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"8th International Congress on Energy Fluxes and Radiation Effects","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.56761/efre2022.c3-p-048002","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
Porous tungsten coatings were prepared by magnetron deposition in He environment. The depositions were carried out in HiPIMS mode with a frequency of 1 kHz and a pulse duration of 300 μs. The tungsten target was thermally insulated from the water-cooled cathode. The samples were mounted on three different distances from the target. Temperature of each sample was measured with a dedicated thermocouple and recorded throughout the deposition process. The structure of resulting W-fuzz layers is analyzed and discussed. The deposition rate of tungsten fuzz in a hot-target magnetron system operated in HiPIMS mode is shown to be ~100 nm/min.
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