Scaling MoS2 NCFET to 83 nm with Record-low Ratio of SSave/SSRef.=0.177 and Minimum 20 mV Hysteresis

Guanhua Yang, J. Niu, Congyan Lu, Rongrong Cao, Jiawei Wang, Ying Zhao, X. Chuai, Mengmeng Li, Di Geng, Nianduan Lu, Qi Liu, Ling Li, Ming Liu
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引用次数: 3

Abstract

For the first time, we experimentally prove that MoS2 negative-capacitance field-effect transistor (NCFET) can benefit from device scaling. In the short-channel device (83 nm channel length), ultra-low subthreshold swing (SS) of 17.28 mV/dec minimum and 39 mV/dec in average, is demonstrated without suffering from hysteresis. The average SS (SSave) improvement factor of MoS2 NCFET with respect to reference MoS2 FET, which is quantified by SSave/SSRef., reaches a record-low value of 0.177 among all hysteresis-free 2D NCFETs reported so far. Furthermore, 364 and 26 times improvements of IDS are achieved at VGS = 0 V and 1.5 V, respectively.
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将MoS2 NCFET缩放至83 nm, SSave/SSRef.=0.177,迟滞最小20 mV
我们首次通过实验证明了MoS2负电容场效应晶体管(NCFET)可以从器件缩放中受益。在短通道器件(83 nm通道长度)中,超低亚阈值摆幅(SS)最小值为17.28 mV/dec,平均值为39 mV/dec,且无迟滞现象。MoS2 nfet相对于参考MoS2 FET的平均SS (SSave)改进因子,由SSave/SSRef量化。,在迄今报道的所有无迟滞2D ncfet中达到了历史最低值0.177。在VGS = 0 V和1.5 V时,IDS分别提高了364倍和26倍。
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