MEMS based dual-axes confocal clinical endoscope for real time in vivo imaging

W. Piyawattanametha, M. Mandella, H. Ra, J.T.C. Liu, E. Garai, G. Kino, O. Solgaard, C. Contag
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引用次数: 3

Abstract

We demonstrate a dual-axes confocal endoscope in a 5.5 mm diameter package for clinical use. Miniaturization is achieved by using a barbell-shaped, gimbaled, two-dimensional MEMS scanner that is actuated by self-aligned, vertical-comb actuators. The maximum DC optical scan angles are plusmn2.6deg on the inner axis and plusmn0.8deg on the outer axis, and the corresponding resonance frequencies are 3.1 kHz and 1.1 KHz. The maximum imaging rate is 10 frames/second, and the microscope achieves full-width-half-maximum transverse and axial resolutions of 5 mum and 7 mum, respectively when operated in the near infrared wavelength (785 nm).
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基于MEMS的双轴共聚焦临床内窥镜实时体内成像
我们展示了一个双轴共聚焦内窥镜在5.5毫米直径包临床使用。小型化是通过使用一个杠铃形状的、平衡的、二维MEMS扫描仪来实现的,该扫描仪由自对准的、垂直梳状的驱动器驱动。最大直流光学扫描角度为内轴+ usmn2.6°,外轴+ usmn0.8°,对应的共振频率为3.1 kHz和1.1 kHz。最大成像速率为10帧/秒,在近红外波段(785 nm)工作时,显微镜的横向和轴向分辨率分别为5 μ m和7 μ m。
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Optical add/drop filter based on dual curved photonic crystal resonator MEMS based dual-axes confocal clinical endoscope for real time in vivo imaging Widely tunable Fabry-Perot optical filter using fixed-fixed beam actuators A varifocal micromirror with pure parabolic surface using bending moment drive Stabilization of temperature characteristics of micromirror for low-voltage driving using thin film torsion bar of tensile poly-Si
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