Pub Date : 2008-10-07DOI: 10.1109/GROUP4.2008.4638161
P. Andalib, N. Granpayeh
In this paper we propose a novel ultra compact photonic crystal resonator and investigate add/drop filter based on it. Simulation and analysis have been done by finite difference time domain and plane wave expansion method.
{"title":"Optical add/drop filter based on dual curved photonic crystal resonator","authors":"P. Andalib, N. Granpayeh","doi":"10.1109/GROUP4.2008.4638161","DOIUrl":"https://doi.org/10.1109/GROUP4.2008.4638161","url":null,"abstract":"In this paper we propose a novel ultra compact photonic crystal resonator and investigate add/drop filter based on it. Simulation and analysis have been done by finite difference time domain and plane wave expansion method.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-10-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123880707","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607822
M. Nakada, K. Takahashi, A. Higo, H. Fujita, H. Toshiyoshi
We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.
{"title":"Design and fabrication of parylene-hinged slow-scan optical scanner for OCT endoscope application","authors":"M. Nakada, K. Takahashi, A. Higo, H. Fujita, H. Toshiyoshi","doi":"10.1109/OMEMS.2008.4607822","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607822","url":null,"abstract":"We report a new design and fabrication of parylene-hinged electrostatic optical scanner made by the SOI-MEMS process technology. Parylene is a CVD-processed organic material of small elastic constant and high chemical stability, and it was found to be suitable to make a low-voltage MEMS scanner of low resonance frequency.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"7 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"115147151","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607805
R. Shaik, W. Monch, H. Krause, H. Zappe
A system capable of both two-dimensional lateral positioning and focusing of a liquid micro-lens for variable fiber coupling is presented. Lateral positioning and focus adjustment is accomplished by electrowetting-on-dielectrics. The chip is fabricated on a transparent Pyrex substrate and is equipped with a two dimensional array of electrodes featuring a well-defined microstructure which allows accurate positioning of the liquid micro-lens. The system is used as a variable optical fiber coupling element, and measurements of optical power coupled to a fiber as a function of the applied voltage are presented. Applications such as adaptive wave front sensing, optical tweezers, or three- dimensional focus control for microscopy are envisaged.
{"title":"Reconfigurable liquid micro-lens system for variable fiber coupling","authors":"R. Shaik, W. Monch, H. Krause, H. Zappe","doi":"10.1109/OMEMS.2008.4607805","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607805","url":null,"abstract":"A system capable of both two-dimensional lateral positioning and focusing of a liquid micro-lens for variable fiber coupling is presented. Lateral positioning and focus adjustment is accomplished by electrowetting-on-dielectrics. The chip is fabricated on a transparent Pyrex substrate and is equipped with a two dimensional array of electrodes featuring a well-defined microstructure which allows accurate positioning of the liquid micro-lens. The system is used as a variable optical fiber coupling element, and measurements of optical power coupled to a fiber as a function of the applied voltage are presented. Applications such as adaptive wave front sensing, optical tweezers, or three- dimensional focus control for microscopy are envisaged.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"8 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125061879","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607803
H. Demir
The paper is about emerging technologies enabled by nanophotonics to combat climate change. We developed and demonstrated 1.) nanocrystal hybridized white light sources and those also embedded with plasmonic metal nanoparticles for the reduction of global energy consumption, 2.) photovoltaic nanocrystal scintillators hybridized on solar cells for the generation of efficient green energy sources, and 3.) photocatalytic nanoparticle and nanocomposite systems for massive environmental decontamination, all to contribute to the reduction of greenhouse gas amount.
{"title":"How can we use nanophotonics to help in combating climate change?","authors":"H. Demir","doi":"10.1109/OMEMS.2008.4607803","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607803","url":null,"abstract":"The paper is about emerging technologies enabled by nanophotonics to combat climate change. We developed and demonstrated 1.) nanocrystal hybridized white light sources and those also embedded with plasmonic metal nanoparticles for the reduction of global energy consumption, 2.) photovoltaic nanocrystal scintillators hybridized on solar cells for the generation of efficient green energy sources, and 3.) photocatalytic nanoparticle and nanocomposite systems for massive environmental decontamination, all to contribute to the reduction of greenhouse gas amount.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125385296","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607855
S. Waldis, F. Zamkotsian, P. Lanzoni, W. Noell, M. Canonica, N. D. de Rooij
Next-generation infra-red astronomical instrumentation for space and ground-based telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy (MOS) usable in a cryogenic environment. A 100x200 mum2 micro-mirror array was successfully designed, fabricated and tested, with tilting angle of 20deg at 100 V. In parallel we have developed and implemented a high-resolution Twyman-Green interferometer and a cryo-chamber for full surface and operation characterization. The micromirrors could be successfully actuated before, during and after cryogenic cooling. Surface deformation of gold coated mirrors at 300 K and below 100 K shows a slight increase from 35 nm to 50 nm PtV, still well suited for MOS application.
{"title":"Micro-mirror array for multi-object spectroscopy in cryogenic environment","authors":"S. Waldis, F. Zamkotsian, P. Lanzoni, W. Noell, M. Canonica, N. D. de Rooij","doi":"10.1109/OMEMS.2008.4607855","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607855","url":null,"abstract":"Next-generation infra-red astronomical instrumentation for space and ground-based telescopes requires MOEMS-based programmable slit masks for multi-object spectroscopy (MOS) usable in a cryogenic environment. A 100x200 mum2 micro-mirror array was successfully designed, fabricated and tested, with tilting angle of 20deg at 100 V. In parallel we have developed and implemented a high-resolution Twyman-Green interferometer and a cryo-chamber for full surface and operation characterization. The micromirrors could be successfully actuated before, during and after cryogenic cooling. Surface deformation of gold coated mirrors at 300 K and below 100 K shows a slight increase from 35 nm to 50 nm PtV, still well suited for MOS application.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"305 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116589157","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607851
K. Lin, Rongshun Chen
This work presents a thermoelectric infrared microsensor which is designed and fabricated with TSMC CMOS-MEMS processes. The proposed device can achieve the responsivity of 432.3 V/W and time constant of 2.49 ms at 1 atm.
{"title":"Design and fabrication of CMOS-integrated thermoelectric IR microsensors","authors":"K. Lin, Rongshun Chen","doi":"10.1109/OMEMS.2008.4607851","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607851","url":null,"abstract":"This work presents a thermoelectric infrared microsensor which is designed and fabricated with TSMC CMOS-MEMS processes. The proposed device can achieve the responsivity of 432.3 V/W and time constant of 2.49 ms at 1 atm.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"20 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129749474","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607814
R. Lockhart, M. Tormen, P. Niedermann, T. Overstolz, A. Hoogerwerf, R. Stanley
Optical characterization of a second generation MEMS tuneable blazed grating with a 1times1 mm active area has demonstrated high-efficiency wavelength filtering with reflected outputs >90% and tuning over 25 nm in the near-infrared (NIR).
{"title":"High-efficiency MEMS tuneable gratings for external cavity lasers and microspectrometers","authors":"R. Lockhart, M. Tormen, P. Niedermann, T. Overstolz, A. Hoogerwerf, R. Stanley","doi":"10.1109/OMEMS.2008.4607814","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607814","url":null,"abstract":"Optical characterization of a second generation MEMS tuneable blazed grating with a 1times1 mm active area has demonstrated high-efficiency wavelength filtering with reflected outputs >90% and tuning over 25 nm in the near-infrared (NIR).","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"76 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"121568009","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607869
Xiongyeu Chew, Guangya Zhou, Hongbin Yu, F. Chau
A novel approach of utilizing the fano resonances of photonic crystal rods to achieve high-Q filter capabilities. Here we present the optimization of peaks attenuation and Q-factor properties by permutation of rod dimensions.
{"title":"Fano resonance phenomenon utilizing photonic crystal rods for tunable filter applications","authors":"Xiongyeu Chew, Guangya Zhou, Hongbin Yu, F. Chau","doi":"10.1109/OMEMS.2008.4607869","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607869","url":null,"abstract":"A novel approach of utilizing the fano resonances of photonic crystal rods to achieve high-Q filter capabilities. Here we present the optimization of peaks attenuation and Q-factor properties by permutation of rod dimensions.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"11 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"126479879","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607859
M. Koshiishi, Y. Ezoe, I. Mitsuishi, M. Mita, K. Mitsuda, T. Takano, R. Maeda
An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.
{"title":"Simulation-based design of a MEMS X-ray optic for X-ray astronomy","authors":"M. Koshiishi, Y. Ezoe, I. Mitsuishi, M. Mita, K. Mitsuda, T. Takano, R. Maeda","doi":"10.1109/OMEMS.2008.4607859","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607859","url":null,"abstract":"An ultra light-weight X-ray optic using MEMS technologies was designed for X-ray astronomy. Numerical simulation was utilized to estimate allowable fabrication accuracies. Obtained X-ray images with a fabricated optic were consistent with the design.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"131997252","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
Pub Date : 2008-08-26DOI: 10.1109/OMEMS.2008.4607881
E. H. Khoo, A. Liu, E. Li
This paper present a six port PCWG channel created from a circular photonic crystal array (CPC) with filtering functions. PC based waveguide (PCWG) created along the radial direction of CPC enables the transmission of lightwaves in subwavelength width structures. Additional filter rods are added to the PCWG to server as filtering function so that only allowed lightwaves with designated frequency can pass through the rods set. The other frequencies will be reflected. This PC device allow the distribution of light for different frequencies to different output port channel, which is very useful for multiplexing optical circuit and system.
{"title":"Six port waveguide filter based on circular photonic crystal","authors":"E. H. Khoo, A. Liu, E. Li","doi":"10.1109/OMEMS.2008.4607881","DOIUrl":"https://doi.org/10.1109/OMEMS.2008.4607881","url":null,"abstract":"This paper present a six port PCWG channel created from a circular photonic crystal array (CPC) with filtering functions. PC based waveguide (PCWG) created along the radial direction of CPC enables the transmission of lightwaves in subwavelength width structures. Additional filter rods are added to the PCWG to server as filtering function so that only allowed lightwaves with designated frequency can pass through the rods set. The other frequencies will be reflected. This PC device allow the distribution of light for different frequencies to different output port channel, which is very useful for multiplexing optical circuit and system.","PeriodicalId":402931,"journal":{"name":"2008 IEEE/LEOS International Conference on Optical MEMs and Nanophotonics","volume":"6 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2008-08-26","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"133382013","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
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