Demonstration of Substrate Embedded Ni-Zn Ferrite Core Solenoid Inductors Using a Photosensitive Glass Substrate

Je-An Yu, Dongsu Kim, Insub Han, J. Yook
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引用次数: 2

Abstract

In this work, we propose a Ni-Zn ferrite core embedding process in a photosensitive glass substrate and demonstrate the design and fabrication of substrate embedded inductors and integrated voltage regulators (IVRs) using the substrate embedded ferrite cores. We developed a ferrite core embedding process inside a vertical cavity of a photosensitive glass substrate, so that ferrite core solenoid inductors can be embedded in the substrate. The measured inductance, DC resistance and Q-factor of a 1600μm × 1500μm ferrite core inductor were 209nH, 240mOhm, 15.8 at 18.2Mhz respectively. And a 920μm × 1050μm inductor has inductance of 252nH, DC resistance of 663mOhm, and Q-factor of 16.6 at 20Mhz. The power conversion efficiency of an integrated voltage regulator module was measured up to 85.2%.
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利用光敏玻璃衬底嵌入镍锌铁氧体磁芯电磁电感器的演示
在这项工作中,我们提出了在光敏玻璃衬底中嵌入Ni-Zn铁氧体铁芯的工艺,并演示了使用衬底嵌入铁氧体铁芯的衬底嵌入电感器和集成电压调节器(ivr)的设计和制造。我们开发了一种在光敏玻璃基板的垂直腔内嵌入铁氧体磁芯的工艺,使铁氧体磁芯螺线管电感可以嵌入在基板中。在18.2Mhz下,1600μm × 1500μm铁氧体铁芯电感的电感值为209nH,直流电阻为240mOhm, q因子为15.8。920μm × 1050μm电感在20Mhz时的电感值为252nH,直流电阻为663mOhm, q因子为16.6。集成稳压模块的功率转换效率可达85.2%。
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