Flip-chip bonding processes with low volume SoP technology

Y. Eom, Haksun Lee, Hyun-Cheol Bae, Kwang-Seong Choi, Jin-ho Lee
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Abstract

In order to build solder bumps with a fine-pitch of 100 μm and 130 μm on PCB substrate, low volume solder on pad (LVSoP) technology using a maskless technology was developed for SAC305 solder with a high melting temperature of 220°C. For the LVSoP process, SBM (solder bump maker) material was newly developed. The solder bump maker (SBM) paste and its process were quantitatively optimized to get a uniform height of solder bumps which are almost equal to the height of solder resist. Differential scanning calorimetry (DSC), viscosity measurement and physical flowing of SBM paste were precisely investigated and analyzed during LVSoP processing for an understanding of chemo-rheological phenomena of SBM paste. The average height of solder bumps and their maximum and minimum values were 14.7, 18.3 and 12.0 μm, respectively. It is believed that maskless LVSoP technology can be effectively used for a fine-pitch interconnection of a Cu pillar in the semiconductor packaging field. Flipchip bonding process between PCB substrate with low volume solder bumps and silicon device having the cupper pillars without solder caps was performed. As one of the key solution for fine pitch interconnection with Cu pillar for Flipchip bonding process, it is expected that LVSoP technology can be effectively used in semiconductor packaging.
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采用小体积SoP技术的倒装芯片键合工艺
为了在PCB基板上构建细间距为100 μm和130 μm的焊点,采用无掩模技术开发了低体积焊盘(LVSoP)技术,用于220°C的SAC305焊料。对于LVSoP工艺,新开发了SBM(焊料凹凸剂)材料。定量优化了凹凸锡膏及其工艺,使凹凸锡膏高度均匀,且几乎等于阻焊高度。通过差示扫描量热法(DSC)、粘度测量法和物理流动法对LVSoP加工过程中的SBM膏体进行了精确的研究和分析,以了解SBM膏体的化学流变现象。钎料凸点的平均高度为14.7 μm,最大值为18.3 μm,最小值为12.0 μm。无掩模LVSoP技术可以有效地用于半导体封装领域铜柱的细间距互连。研究了具有小体积焊点凸点的PCB基板与无焊点凸点的铜柱硅器件之间的倒装键合工艺。作为Flipchip键合工艺中铜柱细间距互连的关键解决方案之一,LVSoP技术有望在半导体封装中得到有效应用。
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