Effect of UV and vacuum treatment on stability of WO3 gas sensing films

G. Gao, Guang-ming Wu, Zenghai Zhang, Jiandong Wu, W. Feng, Jun Shen, Zhihua Zhang, Ai Du
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Abstract

UV and vacuum treatment, as well as annealing, were tried to recover the gas sensing property of WO3 films. Results show that gas sensing films can partially recover one or two coloring and bleaching cycles if kept in vacuum condition. And UV irradiation can well recover several cycles. But heat treatment does not show any obvious effect on the gas sensing recovery. Furthermore, IR and XPS spectra were used to identify the mechanism of this improvement. Results reveal that changes of water content will reduce the desorption energy of hydrogen atom, which will accelerate the bleaching velocity.
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紫外和真空处理对WO3气敏膜稳定性的影响
对WO3薄膜进行了紫外处理、真空处理和退火处理,以恢复其气敏性能。结果表明,气敏膜在真空条件下可部分恢复1 ~ 2次染色和漂白循环。紫外线照射可以很好地恢复几个周期。但热处理对气敏回收率无明显影响。利用红外光谱和XPS光谱对其机理进行了分析。结果表明,水含量的变化会降低氢原子的脱附能,从而加快漂白速度。
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