Stacking wafer with multi-stepped silicon micro-trenches to deposit superconducting material for magnetic energy storage

C. Hsu, S. Kumagai, M. Sasaki, Y. Suzuki, T. Hioki, J. Noh, O. Takai, H. Watanabe, H. Doy, T. Motohiro
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Abstract

A 45m-long spiral trench is fabricated as the coil mold for the compact superconducting magnetic energy storage. Multiple patterning can reduce the disconnection caused by the defects. The wafers are polished. Single NbN coil is confirmed to show the superconducting performance.
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用多级硅微沟槽堆叠晶片,沉积超导材料,用于磁能存储
制作了45米长的螺旋沟槽作为紧凑超导储能线圈模具。多重图案化可以减少由缺陷引起的断开。晶圆片被抛光。单个NbN线圈被证实具有超导性能。
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