C. Hsu, S. Kumagai, M. Sasaki, Y. Suzuki, T. Hioki, J. Noh, O. Takai, H. Watanabe, H. Doy, T. Motohiro
{"title":"Stacking wafer with multi-stepped silicon micro-trenches to deposit superconducting material for magnetic energy storage","authors":"C. Hsu, S. Kumagai, M. Sasaki, Y. Suzuki, T. Hioki, J. Noh, O. Takai, H. Watanabe, H. Doy, T. Motohiro","doi":"10.23919/LTB-3D.2017.7947453","DOIUrl":null,"url":null,"abstract":"A 45m-long spiral trench is fabricated as the coil mold for the compact superconducting magnetic energy storage. Multiple patterning can reduce the disconnection caused by the defects. The wafers are polished. Single NbN coil is confirmed to show the superconducting performance.","PeriodicalId":183993,"journal":{"name":"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2017-05-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 5th International Workshop on Low Temperature Bonding for 3D Integration (LTB-3D)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.23919/LTB-3D.2017.7947453","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
A 45m-long spiral trench is fabricated as the coil mold for the compact superconducting magnetic energy storage. Multiple patterning can reduce the disconnection caused by the defects. The wafers are polished. Single NbN coil is confirmed to show the superconducting performance.