On the drop impact performance of IPDTM devices with different process technologies

Yiyi Ma, K. Goh, Xueren Zhang, W. Goh
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Abstract

The associated significant loss with passive devices on silicon substrate is generally believed to be responsible for the presence of low quality factors, making it a poor candidate for the design of efficient output matching networks. STMicroelectronics has addressed this issue by coming up with a low-loss passive technology called IPD™ (Integrated Passive Devices) RLC06 technology, which is a passive process on glass substrate featuring high RF performance and high level of integration with either wire bonded or flip chipped interconnects. In this paper, a 2.8mm×2.8mm WLCSP (Wafer Level Chip Scale Package) was used as test vehicle. The drop impact performance of the test vehicle employing two different RDL (ReDistribution Layer) process technologies was evaluated through finite element modeling. Maximum peeling stress in the regions of interest was extracted and analyzed for comparison. Actual drop test was performed to characterize the drop impact durability of the WLCSP. It is found that the simulation result agrees very well with the experimental observations in terms of failure location and relative drop test robustness of the two structures. However, the small difference in maximum peeling stress may not be able to justify their big difference in drop test reliability. It could be due to the intrinsic limitation of the numerical method adopted as well as to the different failure locations of the two structures, where there may be different material toughness. The validated model was then extended to optimize the design of Al pad and Cu via of the alternative bump pad for the WLSCP package subjected to drop test.
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不同工艺对IPDTM器件跌落冲击性能的影响
硅衬底上无源器件的相关重大损耗通常被认为是导致低质量因素存在的原因,使其成为设计高效输出匹配网络的不良候选。意法半导体提出了一种低损耗无源技术,称为IPD™(集成无源器件)RLC06技术,该技术是一种基于玻璃基板的无源工艺,具有高射频性能和高集成水平,可以采用线键合或倒装互连。本文采用2.8mm×2.8mm晶圆级芯片规模封装(WLCSP)作为测试载体。采用两种不同的重分布层(RDL)工艺对试验车辆的跌落冲击性能进行了有限元建模评价。提取感兴趣区域的最大剥离应力,并对其进行比较分析。进行了实际跌落试验,以表征WLCSP的跌落冲击耐久性。结果表明,在两种结构的失效位置和相对跌落试验鲁棒性方面,模拟结果与实验结果吻合较好。然而,最大剥离应力的微小差异可能不能证明它们在跌落试验可靠性上的巨大差异。这可能是由于所采用的数值方法的固有局限性,也可能是由于两种结构的破坏位置不同,其中可能存在不同的材料韧性。然后将验证的模型扩展到进行跌落试验的WLSCP封装的备选碰撞垫Al垫和Cu孔的优化设计。
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