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2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)最新文献

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Interfacial reactions between Sn-3.8 Ag-0.7Cu solder and Ni-W alloy films Sn-3.8 Ag-0.7Cu焊料与Ni-W合金薄膜的界面反应
C. S. Chew, A. Haseeb, M. Johan
In this study, interfacial reactions between Ni-W alloy films and Sn-3.8Ag-0.7Cu solder have been investigated. Ni-W alloys films with tungsten content in the range of 5.0-18.0 at.% was prepared on copper substrate by electrodeposition in ammonia citrate bath. Solder joints were prepared on the Ni-W coated substrate at a reflow temperature of 250°C. The solder joint interface was investigated by cross-sectional scanning electron microscopy, energy dispersive X-ray spectroscopy and electron back scatter diffraction. It has been observed that a (Cu, Ni)6Sn5 layer formed on the Ni-W alloy film after reflow. The thickness of the (Cu, Ni)6Sn5 layer was found to decrease with the increase of tungsten content in the Ni-W film. An additional layer with a bright appearance was also found to form below the (Cu, Ni)6Sn5 layer. The bright layer was identified to be a ternary phase containing Sn, Cu, W and Ni. The bright layer is found to be amorphous and is suggested to have formed through solid state amorphization caused by anomalously fast diffusion of Sn into Ni-W film.
本研究研究了Ni-W合金薄膜与Sn-3.8Ag-0.7Cu焊料之间的界面反应。含钨量在5.0-18.0 at的Ni-W合金薄膜。在柠檬酸氨浴中电沉积在铜衬底上制备了%。在回流温度为250℃的条件下,在Ni-W涂层基板上制备焊点。采用横断面扫描电镜、能量色散x射线能谱和电子背散射衍射对焊点界面进行了研究。经再流处理后,在Ni- w合金膜上形成一层(Cu, Ni)6Sn5层。随着Ni- w膜中钨含量的增加,(Cu, Ni)6Sn5层的厚度减小。在(Cu, Ni)6Sn5层下方还形成了一层具有明亮外观的层。该亮层为含Sn、Cu、W和Ni的三元相。发现明亮层是非晶态的,可能是由Sn异常快速扩散到Ni-W薄膜中引起的固态非晶态形成的。
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引用次数: 3
Bond stitch on ball for bare copper wire 裸铜线在球上的粘合缝
Tan Kai Chat, Liong Jin Yoong
The integration of multiple functions IC into single package including MCM package, 3D stacking, system in package had became a trend in recent year. In addition, demand of thin packages is rapidly gaining momentum with the emerging of advance handheld consumer products. All of these integrations and developments need BSOB bonding for interconnection purpose. Cu wire with lower cost, better reliability and electrical performance is favored in packaging material selection but BSOB in Cu wire is a rare case and inherent its challenges during implementation. For success Cu BSOB bond, bond pad structure design must be robust enough to withstand two time thermosonic impact, perfect integration between bump & stitch must be in place and ball bond had to be firmly bonded on Ag/PPF surface. Success of characterization will be lifmited if these few factors are not considered. In this study, we will discuss challenges encountered during bare Cu BSOB characterization i.e Cu bump formation stability and consistency, interaction of oxidized bump with 2nd bond stitch on Cu oxide surface by mean of stitch pull strength, cross-section analysis with varies bump staging time, BOAC bond pad structure robustness test without failure at extreme condition, and ball bond integrity on uPPF surface. Complete understanding of multiple interacting factors will promise a robust bonding condition with long term stability.
多功能集成电路集成到一个封装中,包括MCM封装、3D堆叠、系统内封装等已成为近年来的发展趋势。此外,随着先进手持消费产品的出现,对薄封装的需求正在迅速增长。所有这些集成和开发都需要BSOB绑定以实现互连目的。由于铜线材成本低、可靠性好、电性能好,在包装材料的选择中受到青睐,但铜线材的BSOB是一种罕见的情况,在实施过程中存在着挑战。为了成功地粘合Cu BSOB,粘合垫结构设计必须足够坚固,能够承受两次热声冲击,凸点和针迹之间必须完美结合,球粘合必须牢固地粘合在Ag/PPF表面。如果不考虑这几个因素,表征的成功将受到限制。在本研究中,我们将讨论在裸Cu BSOB表征过程中遇到的挑战,即Cu肿块形成的稳定性和一致性,氧化肿块与Cu氧化物表面上的第二键迹的相互作用(通过针迹拉强度),不同肿块阶段时间的横截面分析,BOAC键垫结构在极端条件下未失效的鲁棒性测试,以及upppf表面的球键完整性。对多种相互作用因素的全面了解将保证具有长期稳定性的牢固结合条件。
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引用次数: 3
Intermetallic evolution between Sn-3.5Ag-1.0Cu-xZn lead free solder and copper substrate under long time thermal aging (x: 0, 0.1, 0.4, 0.7) 长时间热时效下Sn-3.5Ag-1.0Cu-xZn无铅焊料与铜衬底的金属间演变(x: 0, 0.1, 0.4, 0.7)
I. Yahya, N. A. A. Ghani, M. M. Salleh, H. A. Hamid, Z. Ahmad, R. Mayappan
Due to environmental concern regarding toxicity of lead-based solder, the lead-free solders were introduced as a replacing solder in microelectronics devices technology. In this study, the effects of 0.1, 0.4 and 0.7 wt% Zn additions on the intermetallic formation and thickness of Sn-3.5Ag-1.0Cu solder on Cu substrate after long time aging were investigated. The X-Ray Diffraction (XRD) analysis shown that there were Cu6Sn5, Cu3Sn, β-Sn, CuZn and Ag3Sn phase formed after sintering process. The morphology of the intermetallic was observed under Scanning Electron Microscope (SEM) and the elemental distribution was confirmed by Energy Dispersive X-ray (EDX). The intermetallic thickness increases as the aging temperature increases while the addition of zinc into the system has suppressed the intermetallic formation.
由于铅基焊料的毒性对环境的影响,无铅焊料被引入到微电子器件技术中作为焊料的替代品。本文研究了添加0.1、0.4和0.7 wt% Zn对Cu衬底上长时间时效后Sn-3.5Ag-1.0Cu钎料金属间形成和厚度的影响。x射线衍射(XRD)分析表明,烧结过程中形成Cu6Sn5、Cu3Sn、β-Sn、CuZn和Ag3Sn相。用扫描电镜(SEM)观察了金属间化合物的形貌,并用能量色散x射线(EDX)确定了元素的分布。随着时效温度的升高,金属间质的厚度增加,而锌的加入抑制了金属间质的形成。
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引用次数: 2
Pd coated Cu wire bond on XoAA material in LQFP package LQFP封装中XoAA材料的Pd包覆铜线键合
W. Yong, J. Teo, G. Lee, Tan Kian Heong, A. Swee
Pd coated wire is increasely being used as a substitute for bare Cu wire. Being a noble metal, Pd coated wire has high resistance to oxidation enabling longer shelf life. Its chemical properties also exhibit better second bond-ability on micro PPF lead frame enabling simple bond process translating to high throughput and yield. It has higher stiffness which is able to minimize the wire sweep especially for LQFP, as well as thermo-mechnical robustness. However, there are a few challenges to be overcomed before the bonding process can be released. Basically, Pd will diffuse non-uniformly into FAB after EFO sparking. The formation of Pd-Cu alloys will increase FAB hardness resulting in higher risk of oxide crack issue. Technically, due to its physical properties, Pd coated wire will produce higher bonding impact on the bond pad in order to achieve stable and reliable 1 st bond process. Conversely, this approach is not feasible for XoAA material. A new 1 st bonding process has to be developed that can produce a stable bond yet able to meet all buy off requirements. This paper will show the study of Pd coated wire interaction with pad metallization of NiP/Pd/ Au on XoAA material. In the 1 st bond process technology development, the effect of capillary on pad structure are examined. The traditional capillary design appears to be detrimental to XoAA material. A special capillary design was introduced that incorporated a different bond mechanism with the consideration of wire properties and pad structure. An extensive Design of Experiment (DOE) is carried out to define a robust process window. New analysis method by using optical profiling was also introduced for quick and reliable assessment for pad deformation. Bond interface was also validated. Transmission Electron Microscopy (TEM) with EDX line scan analysis showed the presence of Cu-Pd at the bond interface. This study also established two criterias to control oxide crack issue. This process technology is proven and able to meet automotive requirement. In short, the requirements to achieve stable bondability and reliability has been developed in this study.
钯包覆线越来越多地被用作裸铜线的替代品。作为一种贵金属,钯包覆线具有较高的抗氧化性,使保质期更长。它的化学性质在微型PPF引线框架上也表现出更好的二次键合能力,使简单的键合过程转化为高通量和良率。它具有更高的刚度,能够最大限度地减少线材扫描,特别是对于LQFP,以及热机械稳健性。然而,在粘合过程可以释放之前,有一些挑战需要克服。基本上,Pd在EFO火花后会不均匀地扩散到FAB中。钯铜合金的形成会增加FAB的硬度,从而增加氧化裂纹问题的风险。从技术上讲,由于钯包覆线的物理性质,为了实现稳定可靠的一级键合过程,钯包覆线会对键合垫产生更高的键合冲击。相反,这种方法对于XoAA材料是不可行的。必须开发一种新的粘合工艺,既能产生稳定的粘合,又能满足所有的买断要求。本文主要研究了在XoAA材料上进行NiP/Pd/ Au焊金属化对钯包覆线相互作用的影响。在键合工艺技术的发展中,考察了毛细管对焊盘结构的影响。传统的毛细管设计似乎不利于XoAA材料。引入了一种特殊的毛管设计,该设计结合了不同的键合机制,同时考虑了金属丝性能和焊盘结构。通过广泛的实验设计(DOE)来定义一个稳健的过程窗口。介绍了一种快速、可靠地评估垫块变形的光学剖面分析方法。还验证了绑定接口。透射电子显微镜(TEM)和EDX线扫描分析表明,Cu-Pd存在于键界面。本研究还建立了控制氧化裂纹问题的两个标准。该工艺技术经过验证,能够满足汽车行业的要求。总之,本研究提出了实现稳定粘接性和可靠性的要求。
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引用次数: 0
Robust power package development with mechanical simulation and reliability validation 通过机械仿真和可靠性验证开发健壮的电源封装
Xueren Zhang, K. Goh, Yiyi Ma, W. Wong
Thermo-mechanical reliability is one of the major concerns for electronic packages, especially for power packages operating in extremely harsh environment. As the trends towards high density and function integration, advanced power device becomes more sensitive to environmental stress. Comprehensive study is needed from design, process to test towards robust power package with high reliability. In this paper, we will demonstrate the successful application of simulation in the development of a series of robust leaded power packages. Firstly, finite element analysis(FEA) has been carried out to understand die stress behavior inside the package during assembly and reliability tests, i.e. from die attach, post mold cure, reflow to thermal cycling etc. Then DOE matrix is run to obtain the critical responses to different factors, which leads to guidelines on package design and material selection. A series of robust power packages have been developed with optimized package geometry and bill of materials.
热机械可靠性是电子封装的主要问题之一,特别是在极其恶劣的环境中工作的动力封装。随着大功率器件向高密度化和功能集成化发展,其对环境应力的敏感性越来越高。从设计、工艺到测试,需要对高可靠性的鲁棒电源进行全面的研究。在本文中,我们将展示仿真在一系列鲁棒铅电源封装开发中的成功应用。首先,进行了有限元分析(FEA),以了解封装内在装配和可靠性测试期间的模具应力行为,即从模具附着,模后固化,回流到热循环等。然后运行DOE矩阵,得到不同因素下的临界响应,从而为封装设计和材料选择提供指导。开发了一系列具有优化封装几何形状和材料清单的坚固电源封装。
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引用次数: 1
Solder ball robustness study on polymer core solder balls for BGA packages BGA封装用聚合物芯焊锡球的稳健性研究
Y. B. Kar, Tan Cai Hui, A. Agileswari, C. Lo
Restriction of Hazardous Substance (RoHS) Regulation came into effect in 2006 due to the hazardous effects of lead to human's health and toxicity for environment. As such, the leaded solder ball was replaced by lead-free solder ball which is now widely used in semiconductor industries. However, there was a concern on the robustness of lead-free solder ball especially on drop ball issues when compared to lead solder ball, especially when subjected to reliability stress tests. The polymer core solder ball was invented to solve the drop ball issue. Polymer core solder ball with an additional polymer core inside the solder functions as a stress buffer to dissipate stress better compared to the current conventional lead-free solder ball. However, a new problem arises which is the formation of Kirkendall voids in between the Copper (Cu) and solder interface which results in poor reliability performance. This formation of voids could be due to the faster diffusion from Cu to Tin (Sn) than Sn to Cu. Therefore, an additional Nickel (Ni) layer is coated on top of Cu to overcome this problem. The function of Ni is to limit / reduce the diffusion from Cu to Sn thus preventing the formation of Kirkendall voids. This enhances the robustness of the solder ball joint. The solder ball shear strength test and tray drop test were conducted in this research study under different reliability stress conditions such as temperature cycle (TC) and high temperature storage (HTS) stress to verify the robustness and the reliability of the polymer core solder balls. The solder ball shear strength experiment was conducted via Dage 4000 series bond tester and drop reliability test was carried out via the tray drop test. It is observed that the shear strength for polymer core solder ball without Ni coating layer decreased in TC and HTS stress condition and the tray drop test reliability is the worst in HTS 1008 hours. This is due to the excessive formation of Kirkendall voids resulting from the faster diffusion rate from Cu to Sn than Sn to Cu. From this research study, it can be concluded that the polymer core solder ball with an additional of Ni coating layer gives higher joint strength and better drop reliability performance compared to the polymer core solder ball without additional Ni coating layer.
由于铅对人类健康的危害和对环境的毒性,《有害物质限制条例》(RoHS)于2006年生效。因此,含铅焊锡球被现在广泛应用于半导体工业的无铅焊锡球所取代。然而,与含铅焊锡球相比,无铅焊锡球的稳健性令人担忧,特别是在落球问题上,特别是在进行可靠性压力测试时。为了解决掉球问题,发明了聚合物芯焊锡球。与目前传统的无铅焊料球相比,在焊料内附加聚合物芯的聚合物芯焊料球具有应力缓冲作用,可以更好地消除应力。然而,在铜与焊料界面之间形成了Kirkendall空洞,导致可靠性差。这种孔洞的形成可能是由于Cu到Tin (Sn)的扩散速度比Sn到Cu的扩散速度快。因此,一层额外的镍(Ni)层被涂在铜的顶部来克服这个问题。Ni的作用是限制/减少Cu向Sn的扩散,从而防止Kirkendall空洞的形成。这提高了焊料球接头的坚固性。本研究在温度循环(TC)和高温储存(HTS)应力等不同可靠性应力条件下进行了焊锡球剪切强度试验和托盘跌落试验,验证了聚合物芯焊锡球的鲁棒性和可靠性。通过Dage 4000系列粘结试验机进行了焊球抗剪强度试验,通过托盘跌落试验进行了跌落可靠性试验。结果表明,无Ni涂层的聚合物芯焊料球在高温高温和高温高温应力条件下抗剪强度降低,在高温高温1008小时时托盘跌落试验可靠性最差。这是由于Cu到Sn的扩散速度比Sn到Cu的扩散速度快,导致过量的Kirkendall空洞形成。通过本研究可以得出结论,与未添加Ni涂层的聚合物芯焊锡球相比,添加Ni涂层的聚合物芯焊锡球具有更高的接头强度和更好的跌落可靠性性能。
{"title":"Solder ball robustness study on polymer core solder balls for BGA packages","authors":"Y. B. Kar, Tan Cai Hui, A. Agileswari, C. Lo","doi":"10.1109/IEMT.2012.6521760","DOIUrl":"https://doi.org/10.1109/IEMT.2012.6521760","url":null,"abstract":"Restriction of Hazardous Substance (RoHS) Regulation came into effect in 2006 due to the hazardous effects of lead to human's health and toxicity for environment. As such, the leaded solder ball was replaced by lead-free solder ball which is now widely used in semiconductor industries. However, there was a concern on the robustness of lead-free solder ball especially on drop ball issues when compared to lead solder ball, especially when subjected to reliability stress tests. The polymer core solder ball was invented to solve the drop ball issue. Polymer core solder ball with an additional polymer core inside the solder functions as a stress buffer to dissipate stress better compared to the current conventional lead-free solder ball. However, a new problem arises which is the formation of Kirkendall voids in between the Copper (Cu) and solder interface which results in poor reliability performance. This formation of voids could be due to the faster diffusion from Cu to Tin (Sn) than Sn to Cu. Therefore, an additional Nickel (Ni) layer is coated on top of Cu to overcome this problem. The function of Ni is to limit / reduce the diffusion from Cu to Sn thus preventing the formation of Kirkendall voids. This enhances the robustness of the solder ball joint. The solder ball shear strength test and tray drop test were conducted in this research study under different reliability stress conditions such as temperature cycle (TC) and high temperature storage (HTS) stress to verify the robustness and the reliability of the polymer core solder balls. The solder ball shear strength experiment was conducted via Dage 4000 series bond tester and drop reliability test was carried out via the tray drop test. It is observed that the shear strength for polymer core solder ball without Ni coating layer decreased in TC and HTS stress condition and the tray drop test reliability is the worst in HTS 1008 hours. This is due to the excessive formation of Kirkendall voids resulting from the faster diffusion rate from Cu to Sn than Sn to Cu. From this research study, it can be concluded that the polymer core solder ball with an additional of Ni coating layer gives higher joint strength and better drop reliability performance compared to the polymer core solder ball without additional Ni coating layer.","PeriodicalId":315408,"journal":{"name":"2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)","volume":"2 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134394802","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 7
Cavity packages for volume MEMS applications 用于批量MEMS应用的空腔封装
A. Evans
{"title":"Cavity packages for volume MEMS applications","authors":"A. Evans","doi":"10.1109/IEMT.2012.6521801","DOIUrl":"https://doi.org/10.1109/IEMT.2012.6521801","url":null,"abstract":"","PeriodicalId":315408,"journal":{"name":"2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)","volume":"23 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2012-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"132141351","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Enhanced fan-out WLP for high power device packaging 用于大功率器件封装的增强扇出式WLP
Yonggang Jin, J. Teysseyre, A. R. Y. Liu, G. Goh, Yiyi Ma, S. Yoon
With the advancement of fan-out embedded wafer level packaging technology (eWLB), it is more and more promising compared with fan-in WLP, because it can offers great feasibility and flexibility for more I/Os, multi-chips, and system integration. But there are some restrictions in possible applications for Fan-In WLP or Fan-out WLP since global chip trends tend toward smaller chip areas with an increasing number of interconnects and better thermal performance. Fan-out wafer level packaging has been developed in the last past 5 years. Advantages of Fan-out WLP are included smaller footprint; thinner package thickness with thinning of molded wafer. For further smaller profile and smaller package size, QFN-like package format is studied and developed. eWLL(embedded wafer level LGA) is developed for further thinner profile and smaller form without solder ball. It can be significant advantage of low profile and miniaturized applications. However some challenge is foreseen with eWLL, includes thermal performance, eletromigration and reliability for high power application. This paper will focus on simulation study and test data correlation.
随着扇出嵌入式晶圆级封装技术(eWLB)的发展,它比扇入嵌入式晶圆级封装技术(WLP)越来越有前景,因为它可以为更多的I/ o、多芯片和系统集成提供极大的可行性和灵活性。但扇入式或扇出式WLP的可能应用存在一些限制,因为全球芯片趋势趋向于更小的芯片面积,越来越多的互连和更好的热性能。在过去的5年中,扇形晶圆级封装得到了发展。扇出式WLP的优点包括占地面积更小;随着模制晶圆片变薄,封装厚度变薄。为了进一步实现更小的外形和更小的封装尺寸,研究和开发了类qfn封装格式。嵌入式晶圆级LGA(嵌入式晶圆级LGA)是为进一步实现更薄的轮廓和更小的形状而开发的,无需焊球。它可以成为低姿态和小型化应用程序的显著优势。然而,eWLL也面临着一些挑战,包括热性能、电迁移和高功率应用的可靠性。本文将着重于仿真研究和测试数据的相关性。
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引用次数: 3
Solder microstructure and intermetallic interface evaluation between Sn-3.5Ag-1.0Cu-xNi lead free solder under long time thermal aging (x: 0, 0.05, 0.2, 0.5) 长时间热时效(x: 0、0.05、0.2、0.5)下Sn-3.5Ag-1.0Cu-xNi无铅焊料的钎料微观结构及金属间界面评价
N. A. A. Ghani, I. Yahya, M. M. Salleh, S. Shamsuddin, Z. Ahmad, R. Mayappan
Sn-3.5Ag-1.0Cu-xNi (x: 0, 0.05, 0.2, 0.5) solder alloy has been developed to improve properties and microstructure of Sn-3.5Ag-1.0Cu based solder. The composite solder were synthesized via the powder metallurgy route which consist of blending, compacting and sintering process. The sintered solders were characterized for it melting temperature, SEM-EDX analysis was done to confirm the homogeneity of sample element distribution and X-Ray diffraction (XRD) analysis was conducted to see the presents of some phases. XRD analysis of sintered sample showed the presents of Ni3Sn4 and Ni3Sn2 phases. Solders were melted on copper substrate at 250°C for one minute on hot plate and aged at 150°C from 0 to 400 hours. The microstructure of the solder and the growth of IMC formation were studied under Scanning Electron Microscope (SEM) and EDX. The phases formed were studied under SEM-EDX. The SEM results show the presence of Cu6Sn5, Cu3Sn and Ag3Sn intermetallic in the Sn-3.5Ag-1.0Cu solder and Sn-3.5Ag-1.0Cu-xNi solder.
为改善Sn-3.5Ag-1.0Cu基钎料的性能和组织,研制了Sn-3.5Ag-1.0Cu- xni (x: 0,0.05, 0.2, 0.5)钎料合金。采用粉末冶金工艺,经过共混、压实和烧结工艺合成了复合钎料。用SEM-EDX分析样品元素分布的均匀性,用x射线衍射(XRD)分析部分相的形貌。烧结试样的XRD分析表明,烧结试样中存在Ni3Sn4和Ni3Sn2相。焊料在铜衬底上250℃热板上熔化1分钟,150℃时效0 ~ 400小时。利用扫描电镜(SEM)和电子能谱(EDX)研究了钎料的显微组织和IMC的生长情况。在SEM-EDX下对所形成的相进行了研究。SEM结果表明,Sn-3.5Ag-1.0Cu钎料和Sn-3.5Ag-1.0Cu- xni钎料中存在Cu6Sn5、Cu3Sn和Ag3Sn金属间化合物。
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引用次数: 0
On the drop impact performance of IPDTM devices with different process technologies 不同工艺对IPDTM器件跌落冲击性能的影响
Yiyi Ma, K. Goh, Xueren Zhang, W. Goh
The associated significant loss with passive devices on silicon substrate is generally believed to be responsible for the presence of low quality factors, making it a poor candidate for the design of efficient output matching networks. STMicroelectronics has addressed this issue by coming up with a low-loss passive technology called IPD™ (Integrated Passive Devices) RLC06 technology, which is a passive process on glass substrate featuring high RF performance and high level of integration with either wire bonded or flip chipped interconnects. In this paper, a 2.8mm×2.8mm WLCSP (Wafer Level Chip Scale Package) was used as test vehicle. The drop impact performance of the test vehicle employing two different RDL (ReDistribution Layer) process technologies was evaluated through finite element modeling. Maximum peeling stress in the regions of interest was extracted and analyzed for comparison. Actual drop test was performed to characterize the drop impact durability of the WLCSP. It is found that the simulation result agrees very well with the experimental observations in terms of failure location and relative drop test robustness of the two structures. However, the small difference in maximum peeling stress may not be able to justify their big difference in drop test reliability. It could be due to the intrinsic limitation of the numerical method adopted as well as to the different failure locations of the two structures, where there may be different material toughness. The validated model was then extended to optimize the design of Al pad and Cu via of the alternative bump pad for the WLSCP package subjected to drop test.
硅衬底上无源器件的相关重大损耗通常被认为是导致低质量因素存在的原因,使其成为设计高效输出匹配网络的不良候选。意法半导体提出了一种低损耗无源技术,称为IPD™(集成无源器件)RLC06技术,该技术是一种基于玻璃基板的无源工艺,具有高射频性能和高集成水平,可以采用线键合或倒装互连。本文采用2.8mm×2.8mm晶圆级芯片规模封装(WLCSP)作为测试载体。采用两种不同的重分布层(RDL)工艺对试验车辆的跌落冲击性能进行了有限元建模评价。提取感兴趣区域的最大剥离应力,并对其进行比较分析。进行了实际跌落试验,以表征WLCSP的跌落冲击耐久性。结果表明,在两种结构的失效位置和相对跌落试验鲁棒性方面,模拟结果与实验结果吻合较好。然而,最大剥离应力的微小差异可能不能证明它们在跌落试验可靠性上的巨大差异。这可能是由于所采用的数值方法的固有局限性,也可能是由于两种结构的破坏位置不同,其中可能存在不同的材料韧性。然后将验证的模型扩展到进行跌落试验的WLSCP封装的备选碰撞垫Al垫和Cu孔的优化设计。
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引用次数: 0
期刊
2012 35th IEEE/CPMT International Electronics Manufacturing Technology Conference (IEMT)
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