Evaluation of the Pulse Ohmic Non-Linearity Technique as a Reliability Tool for Predicting Susceptibility to Electromigration Damage

J. Lloyd, G. Prokop, M.E. Molchen
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Abstract

The degree of correlation between time to failure by electromigration stressing and pulse ohmic - non-linearity was found to depend markedly on the stress conditions. Only the highest stress and highest joule heating resulted in good correlation. Also, a simple resistance measurement was found to correlate as well with time to failure as pulse non-linearity. It was concluded that pulse non-linearity techniques are of limited usefulness as a reliability tool for all but those applications where severe joule heating is present.
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脉冲欧姆非线性技术作为预测电迁移损伤敏感性的可靠性工具的评价
发现电迁移应力失效时间与脉冲欧姆非线性之间的相关程度明显取决于应力条件。只有最高的应力和最高的焦耳加热产生了良好的相关性。此外,一个简单的电阻测量被发现,以及相关的时间失效作为脉冲非线性。得出的结论是,脉冲非线性技术作为一种可靠性工具的用途有限,除了那些存在严重焦耳加热的应用。
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