{"title":"Silicon resonant cavity enhanced UV flame detector","authors":"Z. Djuric, K. Radulović, N. Trbojevic, A. Lazic","doi":"10.1109/MIEL.2002.1003184","DOIUrl":null,"url":null,"abstract":"The need for selectively sensitive UV photodetectors poses a requirement both for novel detector structures and for new materials and technologies to produce them. In this paper we consider, for the first time, a possibility to use resonant cavity enhanced detector structures with a silicon absorption layer to increase selectivity and speed of UV detectors. A special emphasis is given to the UV photodetectors used in flame detection.","PeriodicalId":221518,"journal":{"name":"2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-08-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"7","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2002 23rd International Conference on Microelectronics. Proceedings (Cat. No.02TH8595)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MIEL.2002.1003184","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 7
Abstract
The need for selectively sensitive UV photodetectors poses a requirement both for novel detector structures and for new materials and technologies to produce them. In this paper we consider, for the first time, a possibility to use resonant cavity enhanced detector structures with a silicon absorption layer to increase selectivity and speed of UV detectors. A special emphasis is given to the UV photodetectors used in flame detection.
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