Modified transmission line pulse system and transistor test structures for the study of ESD

R. Ashton
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引用次数: 15

Abstract

A modified Transmission Line Pulsing System for characterizing transistors under high currents for ESD performance prediction and understanding is presented which can both stress devices and measure damage. Guidelines for transistor test structure design for use with the system are presented and demonstrated for PMOS transistors.
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改进的传输线脉冲系统和用于ESD研究的晶体管测试结构
提出了一种改进的传输线脉冲系统,用于大电流下晶体管的ESD性能预测和理解,既可以对器件进行应力测量,也可以测量损坏。提出并演示了PMOS晶体管的晶体管测试结构设计指南。
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A new test structure to study electromigration at grain boundaries using the single-crystal aluminum interconnection Test structures for the evaluation of Si substrates Leak current characterization in high frequency operation of CMOS circuits fabricated on SOI substrate Test structure for determining the charge distribution in the oxide of MOS structure Modified transmission line pulse system and transistor test structures for the study of ESD
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