{"title":"A pragmatic approach to managing APC FDC in high volume logic production","authors":"R. Joyce-Wohrmann","doi":"10.1109/ASMC.2003.1194511","DOIUrl":null,"url":null,"abstract":"At Infineon Technologies APC fault detection is now implemented in many process areas in its high volume fabs. With the APC Software \"APC-Trend\" process engineers and maintenance can detect and classify anomalies in machine and process parameters and supervise them on the basis of an automated alarming system. An overview of the current usage of APC FDC at Infineon is given.","PeriodicalId":178755,"journal":{"name":"Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI","volume":"6 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-04-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Advanced Semiconductor Manufacturing Conference and Workshop, 2003 IEEEI/SEMI","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ASMC.2003.1194511","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
At Infineon Technologies APC fault detection is now implemented in many process areas in its high volume fabs. With the APC Software "APC-Trend" process engineers and maintenance can detect and classify anomalies in machine and process parameters and supervise them on the basis of an automated alarming system. An overview of the current usage of APC FDC at Infineon is given.
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